Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
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<strong>EEC</strong> Sensor - <strong>Lam</strong> P & P TCP<br />
Innovative tool sensor interface<br />
HOST<br />
Equipment<br />
Sensor<br />
Network<br />
<strong>EEC</strong> APPS<br />
Raw Sensor Data<br />
LAM Plug and Play<br />
Interface<br />
• universal sensor data<br />
interface<br />
• independent network<br />
ethernet based 10/100 Mbit<br />
• access to logistical data<br />
• merging tool and sensor data<br />
-> the virtual tool<br />
10/15/2002 12:58 PM j:\stndpres\template\IntST.ppt - 5
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