Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
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Sensor Integration<br />
• Plug & Play Protocol<br />
– Provides fast and reliable integration<br />
– The protocol is generic and flexible enough to<br />
support single sensors (e.g. Pressure Sensor) to<br />
entire modules (Metrology Module) or<br />
subsystems (OES System)<br />
• Developer’s Package<br />
– <strong>Lam</strong> will license development package to sensor<br />
manufacturer for rapid development<br />
– Capability is robust enough to enable<br />
independent development<br />
10/15/2002 12:58 PM j:\stndpres\template\IntST.ppt - 4
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