Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
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2300 <strong>EEC</strong> Components<br />
Windows 2000/NT Computer<br />
DIOs, AIOs,<br />
SW Variables,<br />
Events<br />
Trace<br />
Data<br />
Update<br />
CTC<br />
CTC<br />
&<br />
&<br />
TMC<br />
TMC<br />
CTROC<br />
LONWORKS VIOP<br />
LON Devices<br />
Adaptive Data/Event<br />
Configurator, Collector &<br />
Logger<br />
Trace<br />
Data<br />
Update<br />
Adaptive<br />
Data<br />
Collector<br />
TMC<br />
Adaptive Data Collector MVME2604<br />
HW IO Devices<br />
Trace Data Log<br />
Event Log<br />
Alarm Log<br />
Lot History<br />
PSD<br />
LONWORKS<br />
RS232<br />
TCP/IP/Socket Messaging<br />
>1<br />
Plug and Play<br />
TCP/IP/Socket<br />
Sensors<br />
PMC<br />
HSMS/GEM/GEM300<br />
1 Fab Ethernet Port<br />
for both HOST &<br />
<strong>EEC</strong> Interfaces<br />
<strong>EEC</strong> Interfaces<br />
-HSMS<br />
- CORBA<br />
- MODBUS/TCP<br />
- <strong>Lam</strong> P&P TCP<br />
- MS File System<br />
- Net Meeting<br />
TM<br />
Plug and Play<br />
TCP/IP/Socket<br />
Sensors<br />
Factory<br />
Factory<br />
Host<br />
Host<br />
(Station Controller)<br />
(Station Controller)<br />
<strong>EEC</strong> Applications<br />
- <strong>Lam</strong>DataAnalyzer<br />
- <strong>Lam</strong>RemoteStation(CMU)<br />
- <strong>Lam</strong>RecipeBrowser<br />
- <strong>Lam</strong>ConfigurationBrowser<br />
- <strong>Lam</strong>OESGraph<br />
- <strong>Lam</strong>2300SimulatorPlus<br />
- Net Meeting Client<br />
- ProcessWORKS<br />
- TrackWORKS<br />
-TIMS<br />
- E-Diag. (Efabz, Axeda)<br />
- DB(IP21, StartView, Oracle)<br />
ATM VTM<br />
LON Devices<br />
<strong>EEC</strong><br />
All possible data needed for<br />
diagnostics purposes
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