Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
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Area of Focus<br />
• (Smart) Sensors Integration<br />
– Plug & Play technology enables tight integration between equipment<br />
and intelligent sensors or modules<br />
• Adaptive Data Collector<br />
– Configurable data collection to adapt to the individual data resolution<br />
requirements<br />
• Interface Flexibility<br />
– <strong>Lam</strong> 2300 supports a variety of interface options, in addition to the<br />
current established standards<br />
• <strong>EEC</strong> Applications<br />
– <strong>Lam</strong> 2300 provides several application packages for data analysis,<br />
productivity enhancements<br />
– Partnership strategy with other application vendors to increase<br />
capability and product offering<br />
10/15/2002 12:58 PM j:\stndpres\template\IntST.ppt - 2
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