Lam EEC Experiences - Sematech

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Lam’s EEC Applications • Data Analysis – Lam Data Analyzer – Lam OES Graph – Lam Pareto Analyzer • Productivity Tools – Lam Remote Monitor – Lam Recipe Browser – Lam Configuration Browser – Lam 2300 Simulation Plus – Net Meeting • Lam’s Partnerships and Their Applications – ProcessWorks, TrackWorks, TIMS – e-Diagnostics, Database Applications 10/15/2002 12:58 PM j:\stndpres\template\IntST.ppt - 14
Lam EEC Applications 10/15/2002 12:58 PM j:\stndpres\template\IntST.ppt - 15
Page 1 and 2: Lam 2300 EEC Experience Tina Ku, C.
Page 3 and 4: 2300 EEC Components Windows 2000/NT
Page 5 and 6: EEC Sensor - Lam P & P TCP Innovati
Page 7 and 8: Level of Sensor Integration Integra
Page 9 and 10: Interface Flexibility • Supported
Page 11 and 12: EEC INTF - 2nd HSMS Port for APC Co
Page 13: 2300 ModBus/TCP Operation Model CTC
Page 17 and 18: Future EEC Plan • Lam will modify

Lam EEC Experiences - Sematech

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