Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
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<strong>Lam</strong>’s <strong>EEC</strong> Applications<br />
• Data Analysis<br />
– <strong>Lam</strong> Data Analyzer<br />
– <strong>Lam</strong> OES Graph<br />
– <strong>Lam</strong> Pareto Analyzer<br />
• Productivity Tools<br />
– <strong>Lam</strong> Remote Monitor<br />
– <strong>Lam</strong> Recipe Browser<br />
– <strong>Lam</strong> Configuration Browser<br />
– <strong>Lam</strong> 2300 Simulation Plus<br />
– Net Meeting<br />
• <strong>Lam</strong>’s Partnerships and Their Applications<br />
– ProcessWorks, TrackWorks, TIMS<br />
– e-Diagnostics, Database Applications<br />
10/15/2002 12:58 PM j:\stndpres\template\IntST.ppt - 14
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