Lam EEC Experiences - Sematech

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2300 ModBus/TCP Architecture Windows 2000/NT Computer DIOs, AIOs, SW Variables ModBus Target CTC CTC & & TMC TMC PMC MVME2604 (Power PC) RS232 Measurable Status Table Controllable Status Table 4 CTROC PM/VME LON- WORKS LON Devices Status Variables Update VIOP Direct I/O TMC LONWORKS RS232 Plug and Play TCP/IP/Socket Sensors RF Generators Match Network Pendulum Valve OES/IEP SECS/GEM/GEM300 TCP/IP/Socket Messaging >1 1 Fab Ethernet Port for both HSMS & ModBus/TCP ModBus/TCP Factory Host Factory Host (Station Controller) (Station Controller) ModBus ModBus Supervisor Supervisor #1 #1 ModBus ModBus Supervisor Supervisor #2 #2 : READ : Transaction Only ModBus ATM VTM LON Devices TM
2300 ModBus/TCP Operation Model CTC CTC Pentium PC/Windows NT Launch ModBus Client ModBus Target Update Status Variables Update ModBus Server Launch READ Transaction Only Request Update Reply ModBus/TCP ModBus Client ModBus Supervisor ModBus Supervisor 10/15/2002 12:58 PM j:\stndpres\template\IntST.ppt - 13
Page 1 and 2: Lam 2300 EEC Experience Tina Ku, C.
Page 3 and 4: 2300 EEC Components Windows 2000/NT
Page 5 and 6: EEC Sensor - Lam P & P TCP Innovati
Page 7 and 8: Level of Sensor Integration Integra
Page 9 and 10: Interface Flexibility • Supported
Page 11: EEC INTF - 2nd HSMS Port for APC Co
Page 15 and 16: Lam EEC Applications 10/15/2002 12:
Page 17 and 18: Future EEC Plan • Lam will modify

Lam EEC Experiences - Sematech

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