Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
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2300 ModBus/TCP Architecture<br />
Windows 2000/NT Computer<br />
DIOs, AIOs,<br />
SW Variables<br />
ModBus Target<br />
CTC<br />
CTC<br />
&<br />
&<br />
TMC<br />
TMC<br />
PMC<br />
MVME2604<br />
(Power PC)<br />
RS232<br />
Measurable Status Table<br />
Controllable Status Table<br />
4<br />
CTROC<br />
PM/VME<br />
LON-<br />
WORKS<br />
LON Devices<br />
Status Variables Update<br />
VIOP<br />
Direct I/O<br />
TMC<br />
LONWORKS<br />
RS232<br />
Plug and Play<br />
TCP/IP/Socket<br />
Sensors<br />
RF Generators<br />
Match Network<br />
Pendulum Valve<br />
OES/IEP<br />
SECS/GEM/GEM300<br />
TCP/IP/Socket Messaging<br />
>1<br />
1 Fab Ethernet<br />
Port for both<br />
HSMS &<br />
ModBus/TCP<br />
ModBus/TCP<br />
Factory Host<br />
Factory Host<br />
(Station Controller)<br />
(Station Controller)<br />
ModBus<br />
ModBus<br />
Supervisor<br />
Supervisor<br />
#1<br />
#1<br />
ModBus<br />
ModBus<br />
Supervisor<br />
Supervisor<br />
#2<br />
#2<br />
:<br />
READ<br />
:<br />
Transaction Only<br />
ModBus<br />
ATM VTM<br />
LON Devices<br />
TM