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Lam EEC Experiences - Sematech

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2300 ModBus/TCP Architecture<br />

Windows 2000/NT Computer<br />

DIOs, AIOs,<br />

SW Variables<br />

ModBus Target<br />

CTC<br />

CTC<br />

&<br />

&<br />

TMC<br />

TMC<br />

PMC<br />

MVME2604<br />

(Power PC)<br />

RS232<br />

Measurable Status Table<br />

Controllable Status Table<br />

4<br />

CTROC<br />

PM/VME<br />

LON-<br />

WORKS<br />

LON Devices<br />

Status Variables Update<br />

VIOP<br />

Direct I/O<br />

TMC<br />

LONWORKS<br />

RS232<br />

Plug and Play<br />

TCP/IP/Socket<br />

Sensors<br />

RF Generators<br />

Match Network<br />

Pendulum Valve<br />

OES/IEP<br />

SECS/GEM/GEM300<br />

TCP/IP/Socket Messaging<br />

>1<br />

1 Fab Ethernet<br />

Port for both<br />

HSMS &<br />

ModBus/TCP<br />

ModBus/TCP<br />

Factory Host<br />

Factory Host<br />

(Station Controller)<br />

(Station Controller)<br />

ModBus<br />

ModBus<br />

Supervisor<br />

Supervisor<br />

#1<br />

#1<br />

ModBus<br />

ModBus<br />

Supervisor<br />

Supervisor<br />

#2<br />

#2<br />

:<br />

READ<br />

:<br />

Transaction Only<br />

ModBus<br />

ATM VTM<br />

LON Devices<br />

TM

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