Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
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<strong>EEC</strong> INTF - 2nd HSMS Port for APC Connection<br />
• Generic Approach<br />
– <strong>Lam</strong> equipment software acts as a server and passively listen to the<br />
2nd HSMS port<br />
– APC software has to connect to this port actively to establish a<br />
communication link<br />
– Data Sampling Plan(DSP) is created and activated in <strong>Lam</strong> CTC<br />
software<br />
– APC software can enable event report for wafer and recipe process<br />
activities<br />
– APC software can enable time trace data sending<br />
– Time trace data will be sent to 2nd HSMS port in real time(1 second)<br />
whenever data become available<br />
– CPU time clock can be synchronized through Date/Time request<br />
service<br />
– Messaging protocol<br />
10/15/2002 12:58 PM j:\stndpres\template\IntST.ppt - 11
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