Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
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Cluster Tool Communications<br />
Cluster<br />
Tool<br />
Controller<br />
Standard Factory Host<br />
Message transport<br />
E4: SECS-I (Serial)<br />
E37: HSMS (TCP/IP)<br />
Message format<br />
E5: SECS-II<br />
Functionality<br />
E30: Gem<br />
E39: Object Services<br />
E40: Processing Management<br />
E58: ARAMS<br />
E87: Carrier Management<br />
E90: Substrate Tracking<br />
E94: Control Job Management<br />
e-Diagnostics/Fault Detection<br />
Collectively<br />
known as<br />
“300mm<br />
standards”<br />
Model Based Wafer-to-Wafer Control (2nd HSMS port)<br />
We need either a new factory host standard or significant modifications to<br />
existing standards to enable APC within the equipment)<br />
• data sampling plans tied to a run<br />
• a technique for updating settings between process module visits<br />
10/15/2002 12:58 PM j:\stndpres\template\IntST.ppt - 10
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