Lam EEC Experiences - Sematech

Lam 2300
EEC Experience
Tina Ku, C.H. Huang
tina.ku@lamrc.com

Area of Focus
• (Smart) Sensors Integration
– Plug & Play technology enables tight integration between equipment
and intelligent sensors or modules
• Adaptive Data Collector
– Configurable data collection to adapt to the individual data resolution
requirements
• Interface Flexibility
– Lam 2300 supports a variety of interface options, in addition to the
current established standards
• EEC Applications
– Lam 2300 provides several application packages for data analysis,
productivity enhancements
– Partnership strategy with other application vendors to increase
capability and product offering
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2300 EEC Components
Windows 2000/NT Computer
DIOs, AIOs,
SW Variables,
Events
Trace
Data
Update
CTC
CTC
&
&
TMC
TMC
CTROC
LONWORKS VIOP
LON Devices
Adaptive Data/Event
Configurator, Collector &
Logger
Trace
Data
Update
Adaptive
Data
Collector
TMC
Adaptive Data Collector MVME2604
HW IO Devices
Trace Data Log
Event Log
Alarm Log
Lot History
PSD
LONWORKS
RS232
TCP/IP/Socket Messaging
>1
Plug and Play
TCP/IP/Socket
Sensors
PMC
HSMS/GEM/GEM300
1 Fab Ethernet Port
for both HOST &
EEC Interfaces
EEC Interfaces
-HSMS
- CORBA
- MODBUS/TCP
- Lam P&P TCP
- MS File System
- Net Meeting
TM
Plug and Play
TCP/IP/Socket
Sensors
Factory
Factory
Host
Host
(Station Controller)
(Station Controller)
EEC Applications
- LamDataAnalyzer
- LamRemoteStation(CMU)
- LamRecipeBrowser
- LamConfigurationBrowser
- LamOESGraph
- Lam2300SimulatorPlus
- Net Meeting Client
- ProcessWORKS
- TrackWORKS
-TIMS
- E-Diag. (Efabz, Axeda)
- DB(IP21, StartView, Oracle)
ATM VTM
LON Devices
EEC
All possible data needed for
diagnostics purposes

Sensor Integration
• Plug & Play Protocol
– Provides fast and reliable integration
– The protocol is generic and flexible enough to
support single sensors (e.g. Pressure Sensor) to
entire modules (Metrology Module) or
subsystems (OES System)
• Developer’s Package
– Lam will license development package to sensor
manufacturer for rapid development
– Capability is robust enough to enable
independent development
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EEC Sensor - Lam P & P TCP
Innovative tool sensor interface
HOST
Equipment
Sensor
Network
EEC APPS
Raw Sensor Data
LAM Plug and Play
Interface
• universal sensor data
interface
• independent network
ethernet based 10/100 Mbit
• access to logistical data
• merging tool and sensor data
-> the virtual tool
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Innovation - Approach
• Lam’s deliverable to sensor companies
– Protocol specification
– Protocol(TCP/IP/Socket) software in C++
– Desktop simulators for both Lam Server and Sensor Client
Lam
Server
Sensor
Client

Level of Sensor Integration
Integration Type Examples
Source Code Integration RF Match/Pressure Sensor/Control Loops,
Internal OES/Interferometer
DLL Dynamic Link WIDS
TCP/IP(Socket) on
SharedMemory
External OES/Interferometer
TCP/IP(Socket) on Ethernet Foreign OES/Interferometer
Sensor Bus Pumps, Temperature Controller, Chiller
* All can be “Plug and Play” if interface is well defined
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2300 Adaptive Data Collector
• Basic PM Data - Gas/Pressure System, ESC, RF System
– AI type data are collected at 1, 2, 5, and 10 Hz, configurable by user
– DI/DO/AO type data are event driven
– Time stamped at data source
• OES Sensor Data
– Time trace data(IBs and BFs) are part of basic PM data
– Finger printing data are collected at 10 Hz and sent to CTC directly
• Plug and Play Sensor Data
– Sensor controller defines data specifications and notifies PMC
– Data rate at 1, 2, 5 and 10Hz
– Data are logged as regular PM data(easy for data correlation)
– Raw data can be sent directly to EEC applications
– 3 sensors completed, VI Probe, Plasma Monitoring Device, and
Advanced IEP
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Interface Flexibility
• Supported Interface
–HSMS
– CORBA (used by Lam Remote Monitor application)
– ModBus (used by customer for monitoring purposes)
– Plug & Play (used by Lam Data Analyzer application)
– MS File System (used by Lam Data Analyzer
application)
– Net Meeting (used by Net Meeting application)
• Future Interface Plans
– Database access
– Interface A and other established standards
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Cluster Tool Communications
Cluster
Tool
Controller
Standard Factory Host
Message transport
E4: SECS-I (Serial)
E37: HSMS (TCP/IP)
Message format
E5: SECS-II
Functionality
E30: Gem
E39: Object Services
E40: Processing Management
E58: ARAMS
E87: Carrier Management
E90: Substrate Tracking
E94: Control Job Management
e-Diagnostics/Fault Detection
Collectively
known as
“300mm
standards”
Model Based Wafer-to-Wafer Control (2nd HSMS port)
We need either a new factory host standard or significant modifications to
existing standards to enable APC within the equipment)
• data sampling plans tied to a run
• a technique for updating settings between process module visits
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EEC INTF - 2nd HSMS Port for APC Connection
• Generic Approach
– Lam equipment software acts as a server and passively listen to the
2nd HSMS port
– APC software has to connect to this port actively to establish a
communication link
– Data Sampling Plan(DSP) is created and activated in Lam CTC
software
– APC software can enable event report for wafer and recipe process
activities
– APC software can enable time trace data sending
– Time trace data will be sent to 2nd HSMS port in real time(1 second)
whenever data become available
– CPU time clock can be synchronized through Date/Time request
service
– Messaging protocol
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2300 ModBus/TCP Architecture
Windows 2000/NT Computer
DIOs, AIOs,
SW Variables
ModBus Target
CTC
CTC
&
&
TMC
TMC
PMC
MVME2604
(Power PC)
RS232
Measurable Status Table
Controllable Status Table
4
CTROC
PM/VME
LON-
WORKS
LON Devices
Status Variables Update
VIOP
Direct I/O
TMC
LONWORKS
RS232
Plug and Play
TCP/IP/Socket
Sensors
RF Generators
Match Network
Pendulum Valve
OES/IEP
SECS/GEM/GEM300
TCP/IP/Socket Messaging
>1
1 Fab Ethernet
Port for both
HSMS &
ModBus/TCP
ModBus/TCP
Factory Host
Factory Host
(Station Controller)
(Station Controller)
ModBus
ModBus
Supervisor
Supervisor
#1
#1
ModBus
ModBus
Supervisor
Supervisor
#2
#2
:
READ
:
Transaction Only
ModBus
ATM VTM
LON Devices
TM

2300 ModBus/TCP Operation Model
CTC
CTC
Pentium PC/Windows NT
Launch
ModBus
Client
ModBus Target
Update
Status Variables
Update
ModBus
Server
Launch
READ Transaction Only
Request
Update
Reply
ModBus/TCP
ModBus
Client
ModBus Supervisor
ModBus Supervisor
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Lam’s EEC Applications
• Data Analysis
– Lam Data Analyzer
– Lam OES Graph
– Lam Pareto Analyzer
• Productivity Tools
– Lam Remote Monitor
– Lam Recipe Browser
– Lam Configuration Browser
– Lam 2300 Simulation Plus
– Net Meeting
• Lam’s Partnerships and Their Applications
– ProcessWorks, TrackWorks, TIMS
– e-Diagnostics, Database Applications
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Lam EEC Applications
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Lam EEC Applications
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Future EEC Plan
• Lam will modify current 2300 EEC components
to comply with matured standards
• Lam will continue developing new innovative
EEC applications
• EEC will be incorporated into Lam operations
– Demo Labs
– Manufacturing
– Field support
• Lam will continue partnering with viable
software vendors to expand 2300 EEC suite
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Concerns with Standards
• Typically reach about 80-90%
– Variations from Fab to Fab create supporting
hardships
• Maturity
– Fast evolution
• Penalty for earlier adopters
– Adoption by HOST
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