PS-PLLA - Www2.che.nthu.edu.tw
PS-PLLA - Www2.che.nthu.edu.tw
PS-PLLA - Www2.che.nthu.edu.tw
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Thin-film Thickness Control<br />
The plot of film thickness versus spin rate for spin-coated <strong>PS</strong>365-<br />
<strong>PLLA</strong>109 (f v<br />
<strong>PLLA</strong> =0.24) thin films on glass slides. Open circle<br />
indicates the sample thickness measured by SPM whereas open<br />
triangle indicates the thickness measured by depth profile.<br />
Thickness [nm]<br />
180<br />
160<br />
140<br />
120<br />
100<br />
80<br />
60<br />
40<br />
20<br />
Surface Prfiler<br />
0 1000 2000 3000 4000 5000 6000 7000 8000<br />
Spin Rate [rpm]<br />
SPM
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