Spectroscopic Ellipsometry Workshop - L.O.T.-Oriel
Spectroscopic Ellipsometry Workshop - L.O.T.-Oriel
Spectroscopic Ellipsometry Workshop - L.O.T.-Oriel
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<strong>Spectroscopic</strong> <strong>Ellipsometry</strong> <strong>Workshop</strong><br />
July 17th, 2012<br />
Fondazione Istituto Italiano di Tecnologia, Genova<br />
Morning Session: Introduction to <strong>Spectroscopic</strong> <strong>Ellipsometry</strong><br />
This session will give a detailed introduction to the operational principles, instrumental configurations and<br />
application examples of <strong>Spectroscopic</strong> <strong>Ellipsometry</strong>. Software data analysis and system demonstration will give<br />
the participants the opportunity to see these principles applied to real samples.<br />
Program<br />
9.45-10.15 Registration<br />
10.15-10.30 S. Schutzmann – LOT <strong>Oriel</strong> srl Welcome and introduction<br />
10.30-11.00 S. Schutzmann – LOT <strong>Oriel</strong> srl Theory and fundamental of <strong>Spectroscopic</strong> <strong>Ellipsometry</strong><br />
11.00-11.15 Coffee break<br />
11.15-11.45 S. Schutzmann – LOT <strong>Oriel</strong> srl Introduction to data analysis<br />
11.45-12.15 T. Wagner – LOT <strong>Oriel</strong> GmbH Overview of <strong>Spectroscopic</strong> <strong>Ellipsometry</strong> applications<br />
12.15-13.00 T. Wagner – LOT <strong>Oriel</strong> GmbH Instrumentation and measurement demonstration<br />
13.00-14.00 Lunch break<br />
Afternoon session: Woollam users seminar<br />
The seminar will gather part of the Woollam user community and give the opportunity to exchange<br />
experiences and present applications of spectroscopic ellipsometry over a broad range of research topics.<br />
Participants of the morning session and users who are not presenting talks are welcome to attend.<br />
The seminar is chaired by Prof. Maurizio Canepa from Physics Department of University of Genova.<br />
Program<br />
14.00-14.25 M. Canepa – Università di<br />
Genova<br />
14.15-14.35 L. Brigo – Università di<br />
Padova<br />
Welcome and introduction<br />
Ellipsometric characterization of Sol-Gel thin films: porosity<br />
and applications to plasmonic devices<br />
14.35-14.55 E. Taralli – INRIM Torino Spectral ellipsometry measurements of silicon photodiodes<br />
for predictable quantum efficient detectors<br />
14.55-15.15 E. Cianci – CNR IMM, Agrate In situ spectroscopic ellipsometry as a diagnostic for thin<br />
Brianza<br />
oxide films grown by atomic layer deposition<br />
15.15-15.30 Coffee break<br />
15.30-15.50 G. Ruffato – Veneto Plasmonic crystals for sensing applications: spectroscopic<br />
Nanotech<br />
ellipsometry and comparison with numerical simulations<br />
15.50-16.10 R. De Angelis – Università <strong>Spectroscopic</strong> <strong>Ellipsometry</strong>: a tool for the characterization of<br />
di Roma Tor Vergata<br />
innovative materials for optoelectronics at the NeMO Lab<br />
16.10-16.30 C. Toccafondi – Università <strong>Spectroscopic</strong> ellipsometry measurements on nano-granular<br />
di Genova<br />
TiO2 thin films<br />
16.30-16.50 A. Sytchkova – ENEA CR Advanced transparent conductors: Conductivity profiling of<br />
Casaccia<br />
TCO ultrathin layers and Characterization of metal-dielectric<br />
electrods<br />
The language of the workshop is English.<br />
The workshop (both morning and afternoon session) is free of charge but it requires registration due to<br />
limited availability of places.<br />
In order to register, please fill in the form on Page 2 and fax it to:+39 065010389.<br />
You may also send your contact information electronically to schutzmann@lot-oriel.it<br />
www.lot-oriel.it
<strong>Spectroscopic</strong> <strong>Ellipsometry</strong> <strong>Workshop</strong><br />
July 17th, 2012<br />
Fondazione Istituto Italiano di Tecnologia, Genova<br />
Date<br />
July 17th, 2012<br />
Venue Contact information<br />
Fondazione Istituto Italiano di Tecnologia,<br />
Via Morego 30 -16163 Genova<br />
Stefano Schutzmann<br />
LOT <strong>Oriel</strong> Italia srl<br />
Tel.: +39 06 5004204<br />
Fax.: +39 06 5010389<br />
e-mail: schutzmann@lot-oriel.it<br />
The workshop (both morning and afternoon session) is free of charge but it requires registration due to<br />
limited availability of places<br />
I would like to register for the <strong>Workshop</strong><br />
Morning session Afternoon session<br />
(please indicate which session you wish to attend, whether morning, afternoon or both)<br />
Name:___________________________________________________<br />
Institution:_______________________________________________<br />
Address:_________________________________________________<br />
Phone:__________________________________________________<br />
e-mail:__________________________________________________<br />
Signature:_______________________________________________<br />
In order to register, please fill in the form and fax it to:+39 065010389.<br />
or email it to: schutzmann@lot-oriel.it<br />
www.lot-oriel.it