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Magnetic and Electrostatic Microgenerators • Many, many devices in current literature – Chandrakasan, Roundy/Wright, Mitcheson, El-Hamadi, James,Yates, Li, Taishiro, Ching, Miyazaki, Goerge… • Powers range 10’s-100’s of μW • Most employ spring return – Mechanically resonant, 10’s of Hz – several kHz • Others use bistable action return w/o spring – Mitcheson 2004 – broadband • Magnetic generators can approach 1 mW – 100-500 Hz, 25-200 μm motion, ~1 cm3 (court. Mitchenson) • Electrostatic generators tend to produce 100 μW – Simple to integrate onto MEMS – Need bootstrap supply – Constant charge (sliding) and constant voltage (pressing) modes 36 mW @ 12.6 kHz Beeby et al Southampton 6 μW @ 6 Hz Miao et al Imperial College
MEMs Driven Condensor Power Supply 84 mg • MEMs motor in reverse… – Special power-control electronics designed & fabbed –8 μW indicated @ 2.5 kHz, 500 μm motion – Could tile <strong>for</strong> more power – Provides power <strong>for</strong> their sub μW “picoJoule DSP” – Vision of power, sensing, and processing on one chip Anantha Chandrakasan, Jeff Lang - MIT MTL
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