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Solar Grade-Silicon, Ingot, Wafer Technology and Market Trend

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<strong>Solar</strong> <strong>Grade</strong>-<strong>Silicon</strong>, <strong>Ingot</strong>, <strong>Wafer</strong> <strong>Technology</strong> <strong>and</strong> <strong>Market</strong> <strong>Trend</strong> (2008~2012)<br />

2.4.2 Vapor to Liquid Deposition (VLD): Tokuyama<br />

VLD method produces trichlorosilane or monosilane gasses by reacting<br />

metallic silicon with either hydrochloric acid or hydrogen, <strong>and</strong> then produces<br />

liquid silicon directly from the gas. It is similar to the Siemens process in using<br />

trichlorosilane gasses, but it obtains liquid silicon as the gas undergoes a tubeshaped<br />

reactor with inductive heating to be restored.<br />

Figure 2.4.2 VLD Method Concept<br />

Source: Tokuyama<br />

Hence, VLD method has outst<strong>and</strong>ing efficiency <strong>and</strong> productivity. It has<br />

extraction speed 10 times faster than the conventional Siemens process, but<br />

is difficult to delete impurities. The Siemens process starts with obtaining<br />

semiconductor silicon with ultra high purity <strong>and</strong> is applied to the solar gradesilicon<br />

production by lowering the quality <strong>and</strong> enhancing the productivity. On<br />

the other h<strong>and</strong>, VLD process is suitable for the solar grade-silicon production<br />

which requires relatively lower quality <strong>and</strong> high productivity. The VLD process<br />

is currently known to be developed by Tokuyama, but has difficulties in terms<br />

of yield. Its energy efficiency is more than 5 times higher than the Siemens<br />

process.<br />

All Contents of this report remain the property of Displaybank<br />

SAMPLE<br />

Jan’09

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