High transmission EUVL pellicle development - Sematech
High transmission EUVL pellicle development - Sematech
High transmission EUVL pellicle development - Sematech
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Overview<br />
• Motivation &<br />
specs<br />
• Thermal modeling<br />
• <strong>High</strong> <strong>transmission</strong> prototype <strong>development</strong><br />
– Illumination non-uniformity<br />
• Full-scale <strong>pellicle</strong> HVM mechanical test<br />
• DUV/AIMS study<br />
• Summary &<br />
future work<br />
"<strong>EUVL</strong> Pellicle Development", Yashesh Shroff, Pei-Yang Yan, F. Salamassi, Eric Gullickson<br />
<strong>EUVL</strong> Symposium 2008, Lake Tahoe 8
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