High transmission EUVL pellicle development - Sematech
High transmission EUVL pellicle development - Sematech
High transmission EUVL pellicle development - Sematech
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Thermal model<br />
Pellicle<br />
(25% EUV absorbed)<br />
Entrance<br />
Plane of PO<br />
Reticle: 5-20W*<br />
• Instantaneous power at slit can result in high thermal load.<br />
• Transient model is developed to calculate peak rise in <strong>pellicle</strong><br />
temperature<br />
* OoB power & IU <strong>transmission</strong> of EUV + OoB spectrum dependent<br />
"<strong>EUVL</strong> Pellicle Development", Yashesh Shroff, Pei-Yang Yan, F. Salamassi, Eric Gullickson<br />
Illuminator<br />
exit plane<br />
IF:<br />
180W<br />
<strong>EUVL</strong> Symposium 2008, Lake Tahoe 6