High transmission EUVL pellicle development - Sematech
High transmission EUVL pellicle development - Sematech
High transmission EUVL pellicle development - Sematech
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Summary<br />
• Full-size <strong>pellicle</strong>s fabricated with membrane thickness of<br />
70%. Expected <strong>transmission</strong> is 61% double pass<br />
• New process developed to achieve near-best <strong>transmission</strong> of<br />
67% on small-size samples with tensile membrane stress.<br />
• Thermal model completed & shows that CTE compatible mesh<br />
+ Si membrane is necessary to avoid differential thermal<br />
expansion related issues.<br />
• Scan test with in-house scanner shows <strong>pellicle</strong> robustness at<br />
repeated 6G acceleration with peak velocities of 2m/s.<br />
Future work<br />
• Vibration test to satisfy zero-particle adder criteria<br />
• Full-scale <strong>pellicle</strong> for 70% double-pass txm<br />
"<strong>EUVL</strong> Pellicle Development", Yashesh Shroff, Pei-Yang Yan, F. Salamassi, Eric Gullickson<br />
<strong>EUVL</strong> Symposium 2008, Lake Tahoe 22
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