High transmission EUVL pellicle development - Sematech
High transmission EUVL pellicle development - Sematech
High transmission EUVL pellicle development - Sematech
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Scan test: 6G, continuous (100nm membrane on<br />
10um linewidth / 250μm pitch mesh)<br />
"<strong>EUVL</strong> Pellicle Development", Yashesh Shroff, Pei-Yang Yan, F. Salamassi, Eric Gullickson<br />
<strong>EUVL</strong> Symposium 2008, Lake Tahoe 18