High transmission EUVL pellicle development - Sematech

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Scan test: 6G, continuous (100nm membrane on 10um linewidth / 250μm pitch mesh) "EUVL Pellicle Development", Yashesh Shroff, Pei-Yang Yan, F. Salamassi, Eric Gullickson EUVL Symposium 2008, Lake Tahoe 18
Scan test: 6G with 500ms pause every cycle • Two pellicles are tested: 70nm and 100nm membranes with 10/250um (LW/pitch) supporting mesh. • Vacuum environmental chamber was kept at 70mT pressure • Reticle plate was not used (load concerns) "EUVL Pellicle Development", Yashesh Shroff, Pei-Yang Yan, F. Salamassi, Eric Gullickson Accelerometer EUVL Symposium 2008, Lake Tahoe 19
Page 1 and 2: High transmission EUVL pellicle dev
Page 3 and 4: Concept Square cell mesh Hexagonal
Page 5 and 6: Overview • Motivation & specs •
Page 7 and 8: Cooling time Membrane Parameters:
Page 9 and 10: Requirements for reaching pellicle
Page 11 and 12: Transmission results Membrane: 50nm
Page 13 and 14: Pellicle transmission improvement 1
Page 15 and 16: Full-size pellicle development •
Page 17: position (mm) 80 60 40 20 0 -20 -40
Page 21 and 22: DUV AIMS test • 150nm 1:1 feature
Page 23: Acknowledgements •Bob Gunion and

High transmission EUVL pellicle development - Sematech

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