High transmission EUVL pellicle development - Sematech
High transmission EUVL pellicle development - Sematech
High transmission EUVL pellicle development - Sematech
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Full-size <strong>pellicle</strong> scan test<br />
Mechanical stability test to<br />
verify robustness.<br />
Repeated 6g acceleration, 2m/s scan<br />
velocity expected in 180WPH HVM<br />
system.<br />
• Vacuum environment chamber<br />
• Track length 75mm<br />
• 50min test, ramping from 1G6G<br />
– Continuous scan for 10’ at 6G,<br />
limited by motor reliability<br />
concerns<br />
• Full-size <strong>pellicle</strong>s tested:<br />
– 70nm membrane<br />
– 100nm membrane<br />
"<strong>EUVL</strong> Pellicle Development", Yashesh Shroff, Pei-Yang Yan, F. Salamassi, Eric Gullickson<br />
<strong>EUVL</strong> Symposium 2008, Lake Tahoe 16
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