chemical physics of discharges - Argonne National Laboratory
chemical physics of discharges - Argonne National Laboratory chemical physics of discharges - Argonne National Laboratory
._ . _-.. - , , . . ,. . The Pyrex ‘discharge tube56as 50 cm long and 5.5 cm in diameter. The electrodes were polished stainless steel discs, 5 cm in diameter and the cathode could be moved magnetically over a distance of 30 cm. The entire discharge tube, including side-arms, . could be baked to greater than 35OoC. Metal bellows valves were used for all openings into the discharge tube and the normal background pressure of 2 x Torr was achieved with a silicone oil diffusion PUP * The gases were of assayed research grade and pkriodic checks were made for impurities by mass spectrometry. The operating gas was admitted to the discharge tube via a Granville-Phillips variable leak valve, the pressure being measured with a Decker diaphragm gauge. A small flow was maintained through the discharge tube during operations by means of a needle valve to the pumps. The exit pressure was about Torr. Preliminary discharges of about one hour duration were always carried out before measurements were taken. The tube was then evacuated and a fresh gas sample was admitted for the experiment. All results reported here were taken with a gas pressure of 0.28 Torr and a discharge current of 0.250 ma. A schematic diagram of the discharge tube and electrical t circuit is given in Fig. 1. The potentials of the grid and collector relative to the grounded anode could be controlled independently so that either one could be positive or negative with respect to the anode. The collector current passing through precision resistors (0.05%) was measured with a 1 megohm impedance nanovoltmeter which was isolated from ground. The minimum detectable current was 1O‘loA. The potential of 1 . the collector was measured with a vacuum tube voltmeter, while a ~ and digital voltmeter was used for measurement of the grid potential. Grid and-discharge currents were monitored by dc micrometers. Discharge power’was provided by a commercial dc power supply. B. Results (1) Collection of low energy electrons. Fig. 2(a) is a typical semilonarithmic plot of the electron current, showing two straight line segments for- the thermal and secondary electrons respectively. The space potential was obtained from extrapolation of the saturation current to the rising portion of the curve. The gas was pure neon and the probe was near the position of maximum electcon intensity in the negative glow. The electron temperatures of the MaxwellIan distributions were 0.271 and 3.67 eV for the thermal and secondary electrons, and their concentrations were 158 x 10’ 3/m3 and 2.9 x 10’ 3/m3 respectively, assuming collection of the random current at the space potentia16s7. The small electron residual current that was always observed at higher retardation potentials was subtracted from the total electron currents. The collector potential was +7O V with respect to the anode. 2) Collection of positive ions. The collector potential was maiAtained at -70 V and the grid voltage was varied from -70 V to Well above the space potential for the collection of positive ions. The method of calculation of the random positive ion current differed somewhat from previous approaches and is given briefly below. We assume that positive ions are accelerated from the sheath to the grid and are further accelerated by the full potential between the COlleCtor the grid. The current rises until all the random Ion current arriving at the sheath edge has been collected. Further collection of Ion current is the result of sheath expansion, edge effects and potential penetration of the sheath. If we treat the ion currents . . . . I ,‘ 1 ,A 1 ! I 1
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._ . _-.. - , , . . ,. .<br />
The Pyrex ‘discharge tube56as 50 cm long and 5.5 cm in<br />
diameter. The electrodes were polished stainless steel discs, 5 cm<br />
in diameter and the cathode could be moved magnetically over a<br />
distance <strong>of</strong> 30 cm. The entire discharge tube, including side-arms, .<br />
could be baked to greater than 35OoC. Metal bellows valves were used<br />
for all openings into the discharge tube and the normal background<br />
pressure <strong>of</strong> 2 x Torr was achieved with a silicone oil diffusion<br />
PUP *<br />
The gases were <strong>of</strong> assayed research grade and pkriodic checks<br />
were made for impurities by mass spectrometry. The operating gas was<br />
admitted to the discharge tube via a Granville-Phillips variable leak<br />
valve, the pressure being measured with a Decker diaphragm gauge. A<br />
small flow was maintained through the discharge tube during operations<br />
by means <strong>of</strong> a needle valve to the pumps. The exit pressure was about<br />
Torr. Preliminary <strong>discharges</strong> <strong>of</strong> about one hour duration were<br />
always carried out before measurements were taken. The tube was then<br />
evacuated and a fresh gas sample was admitted for the experiment.<br />
All results reported here were taken with a gas pressure <strong>of</strong><br />
0.28 Torr and a discharge current <strong>of</strong> 0.250 ma.<br />
A schematic diagram <strong>of</strong> the discharge tube and electrical t<br />
circuit is given in Fig. 1. The potentials <strong>of</strong> the grid and collector<br />
relative to the grounded anode could be controlled independently so<br />
that either one could be positive or negative with respect to the anode.<br />
The collector current passing through precision resistors (0.05%) was<br />
measured with a 1 megohm impedance nanovoltmeter which was isolated from<br />
ground. The minimum detectable current was 1O‘loA. The potential <strong>of</strong><br />
1<br />
. the collector was measured with a vacuum tube voltmeter, while a<br />
~ and<br />
digital voltmeter was used for measurement <strong>of</strong> the grid potential. Grid<br />
and-discharge currents were monitored by dc micrometers. Discharge<br />
power’was provided by a commercial dc power supply.<br />
B. Results<br />
(1) Collection <strong>of</strong> low energy electrons. Fig. 2(a) is a typical semilonarithmic<br />
plot <strong>of</strong> the electron current, showing two straight line<br />
segments for- the thermal and secondary electrons respectively. The<br />
space potential was obtained from extrapolation <strong>of</strong> the saturation<br />
current to the rising portion <strong>of</strong> the curve. The gas was pure neon and<br />
the probe was near the position <strong>of</strong> maximum electcon intensity in the<br />
negative glow. The electron temperatures <strong>of</strong> the MaxwellIan distributions<br />
were 0.271 and 3.67 eV for the thermal and secondary electrons, and<br />
their concentrations were 158 x 10’ 3/m3 and 2.9 x 10’ 3/m3 respectively,<br />
assuming collection <strong>of</strong> the random current at the space potentia16s7.<br />
The small electron residual current that was always observed at higher<br />
retardation potentials was subtracted from the total electron currents.<br />
The collector potential was +7O V with respect to the anode.<br />
2) Collection <strong>of</strong> positive ions. The collector potential was<br />
maiAtained at -70 V and the grid voltage was varied from -70 V to Well<br />
above the space potential for the collection <strong>of</strong> positive ions. The<br />
method <strong>of</strong> calculation <strong>of</strong> the random positive ion current differed<br />
somewhat from previous approaches and is given briefly below. We<br />
assume that positive ions are accelerated from the sheath to the grid<br />
and are further accelerated by the full potential between the COlleCtor<br />
the grid. The current rises until all the random Ion current<br />
arriving at the sheath edge has been collected. Further collection <strong>of</strong><br />
Ion current is the result <strong>of</strong> sheath expansion, edge effects and<br />
potential penetration <strong>of</strong> the sheath. If we treat the ion currents<br />
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