chemical physics of discharges - Argonne National Laboratory

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4 176 Fig. 8 Boron-Coated Quartz Monofilament (x 340) Top - Hollow in Boron-Coated Quartz Monofilament Middle - Material From Hole Bottom - Ball and Hollow in Thick Coating on Quartz Monofilament 1 i
177 Another source of weakness is the cracking and peeling. Many of these cracks and breaks are the result of handling during removal from the static apparatus. Use of a continuous filament moving through the apparatus and improvement in the adhesion of the Coating to the substrate would possibly eliminate this problem. CONCLUSIONS This paper basically represents a feasibility study of the deposition of d o n from a glow discharge system produced in a boron trichloride-hydrogen medium. Feasibility of the basic concept has been conclusively demonstrated for dielectric or insulating substrates. It is probable that conditions can be adjusted to provide for deposition on metallic or conductive substrates as well. The following secondary conclusions can also be drawn from this work: 0 0 '0 0 e 0 0 0 0 Glow discharges can be initiated a d sustained in hydrogen-boron trichloride mixtures at pressures of 50-100 mm. There is no apparent limit on coating thickness which can be deposited. The deposited boron is amorphous with a partial alpha rhombohedral crystalline character. Deposition rate is of the order of 5 x 10-5 gm/sec. Filament resistance increases with thickness; temperature in turn increases resulting in a higher deposition rate; this also results in increased bodning to the substrate by chemical or diffusive action. The process is quite sensitive to small amounts of impurities in the gas stream, particularly oxygen and moisture. The ratio of hydrogen to boron trichloride has a major effect on nature of the deposit; both sidewall deposition and downstream particle fallout increase with hydrogen concentration. However, the glow is more uniform at high hydrogen values, so these factors must be balanced for optimum performance. An increase in the boron trichloride to hydrogen ratio tends to concentrate the glow around the substrate, promoting efficiency and minimizing extraneous deposition. High hydrogen to boron trichloride ratios tend to produce boranes; operation at reduced rf currents tends to yield (BCl), polymers. Current investigations are concerned with further development of the glow discharge deposition procedure to operate on a continuous basis utilizing moving filament techniques. Indica- tions are that the technique may be used to prepare a high-quality boron filament at reasonable processing rates. ACKNOWLEDGMENT This work was sponsored by the U.S. Air Force under Contract AF 33(615)-2130. Acknowl- edgement is given to J. G. Bjeletich, W. C. Coons, J. Robinson, B. A. Traina, R. N. Varney, and R. D. Wales for assistance on photographic and experimental portions of the program. All are members of the Lockheed Palo Alto Research Laboratory. Further acknowledgment is made to R. M. Neff of the Air Force Materials Laboratory for con- tinuing consultation on progress of the program. 1. 2. 3. 4. REFERENCES R. T. Holzmann and W. F. Morris, J. Chem. Phys. , Vol. 29, 1958, p. 677 W. V. Kotlensky and R. Schaeffer, J. Am. Chem. Soc., Vol. 80, 1958, p. 4517 R. M. Rosenberg. Univ. Microfilms (Ann Arbor, Mich. ) L. C. Card No. MIL-59-2911. 160 pp: Dissertation Abst., Vol. 20, 1959, p. 526 L. Ya. Markovskii, V. I. L'viva, and Yu D. Kondrashev, "Obtaining Elementary Boron in a Glow Discharge." Bor. Trudy Konf. Khim, Bora; Ego Soedineii, pp. 36-45 (1958); cf. FTD-MT-64-427, Foregin Technol. Division, AF System Command, 1985
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)i 1 reesonably complete and accura
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3 inquire about the component of ve
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4 I I 5 To find (t2)av, we assume t
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\ vnich, it is noted can be negativ
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I 7 than or smaller than the second
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i I i I I I ) ) i L , I I . INT1:OD
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13 field per electron is and per co
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. 11. 5. CharRe-Transfer and Ion-Mo
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17 In the followin:: sections much
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above. With that EIN, an estimate o
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21 region in w!iich large, nighlv l
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i ’ understanding: 23 (a) Electro
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Obviously, the secondary ion must h
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27 (22) Franklin, J. L., Munson, M.
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Tables 1-6 present examples of rela
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Table 8 Some Ions Formed by Process
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33 velocity of the reacting partn r
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35 must be added to the Langevin cr
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37 In our laboratory a microwave di
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+ . 4 . r 39 as well as N in a cor0
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ION-MOIECULE REACTION RATES MEASUFI
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43 excitntion 2onditions so that th
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45 In 2 like manner Fig. 3, showing
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47 Absorption Spectra of Transient
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50 maximum fiela. In this manner, a
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52 3 % %- %- 5- a- 7 h W P H 0 L v)
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References I I . A.B.Callear, J.A.G
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._ . _-.. - , , . . ,. . The Pyrex
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58 0 0 0 VI J > I cv . u H a
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.... . 0 2 e I / m 0 H F4 : 1
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\ 0.9 0.8 0.7 06 0.5 0.4 0.3 0.2 01
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65 ' cause of the reduction in the
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INTRODUCTION I' Attachment of polar
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I 69 EXPERIMENTAL The mass spectrom
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+ Figure 1 Mixed water and methanol
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73 ' , radius might be expected bec
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75 Negative Ion Mass Spectra of Som
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A b 1 1 I H I I I FILAMEN T CONTINU
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79 for positive and negative ions,
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51 out to answer some of the questi
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93 INTERACTIONS OF EXCITED SPECIES
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L 4 I*C z 0'2 = a, a U x I m 4 m 0
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I L I, ; > > E Fig. 3 I50 200 150 1
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I 300 r 1 - 200 i io ;' a cn I I. 0
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where DISCUSSION OF XESULTS PERTAIN
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93 where the bar indicates values c
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'I i 'I 0 2. 4 6 8 2 [ N]* x' I 0-2
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Fig. 14 IO 8 6 4F [NO] x IO-" (mole
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for chemiluminescent excitation in
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101 Chemiluminescent Reactions of E
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103 All gases were taken directly f
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10; He: + N2 -. 2He + h': (8) whi!?
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description for both diffusion and
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B. Ions and Electrons I Consider a
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' 112 axial diffusion through the d
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the tube walls occurs continuously
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E2R M ' $6"
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1. 2. 3. 4. 5. 6. 7. 8. 9- 10. u. -
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120 . Dlschorge zone Reactor zone 1
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122 In radiation chemistry the cust
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124 4. chemistry seem limited essen
Page 126 and 127: 126 Conversion of Mixtures into Mor
Page 128 and 129: Hydrazine Synthesis in A Silent dle
Page 130 and 131: {;I . - . .. . - .., . . .. _- .. .
Page 132 and 133: 1 \ \ \ , \ , \ \ Pmer hnrity K.W.
Page 134 and 135: . I operating fact that the sloGe i
Page 136 and 137: _- of ' . 8. - 7 6, Residence Time
Page 138 and 139: 135 Ionic Reactions in Corona Disch
Page 140 and 141: GAS OUT GAS IN i.ho QUADRUPOLE MASS
Page 142 and 143: - + ( ~ ~ + 0 H ) ~ O ~ ( H~o)~H+ +
Page 144 and 145: 144 i I , , , , . + 1- u 3c w Inu c
Page 146 and 147: 146 SYNTHESIS OF ORGANIC COIGhTDS B
Page 148 and 149: mi5 a- dz CI n I a I n +4 - 0 -I- k
Page 150 and 151: 0 z cu I I I
Page 152: I- I - t d m a .rl Y x c, t-' d k
Page 155 and 156: , 155 This result is significant in
Page 157 and 158: Compound Bond he rgy Li I 82 UBr 10
Page 159 and 160: , ”..’ 3or 25 - 5 20 - s 3 w Y
Page 161 and 162: I 161 THE GLOW DISCHARGE DEPOSITION
Page 163 and 164: Fig. 1 Process Apparatus -__l.ll__
Page 165 and 166: v) t- at- InIo Io0 t-Q) loo lcua O
Page 167 and 168: This study is only an approximation
Page 169 and 170: Mole Reaction Material ratio time e
Page 171 and 172: \ i (4) Effect of System Pressure T
Page 173 and 174: 173 Pressure. Since pressure is a c
Page 175: 175 Table VI X-RAY DATA OF DEPOSIT
Page 179 and 180: 179 PLATING IN A CORONA DISCHARGE R
Page 181 and 182: \ 3 , ,\ 110 v 60 CPS MANOMETER . F
Page 183 and 184: I i , \ I i & a - P Fig. 3 Reaction
Page 185 and 186: \ \' C 0 .d * d .- C U d 0) c( 1) L
Page 187 and 188: I i I . Q) I, s w 0 v) Y 0 a w W a
Page 189 and 190: I (b) Polarized Light Fig. 6 Cross
Page 191 and 192: i m v) Y C i! u o) 23 a a- + 191 m
Page 193 and 194: i, d C .d c c W Q ) 0 0 L1Y 0 000 0
Page 195 and 196: i e 4 0 wcr -4 4 al 0 0 0 c) cr 13:
Page 197 and 198: \ E ‘ 1 TIME FOR RUN 13-1 14-1 -
Page 199 and 200: 199 a red heat in this cell using d
Page 201 and 202: \ , t j \ I, v) 2 Y . C 0 u m .I C
Page 203 and 204: 203 VAPOR PHASE FORMATION OF NONCRY
Page 205 and 206: BELL JAR STANC TO VACUUM SYSTEM U T
Page 207 and 208: 207 of the boron oxide film, the fi
Page 209 and 210: i I, 4 I.( Y I- * 0 i f i 3 0.t I I
Page 211 and 212: 211 The Reacticn 3f Oxygen with Car
Page 213 and 214: 2 E, W t- a Z 9 I- a 2 X 0 I50 too
Page 215 and 216: 'i' 100 50 IC 21 5 2.0 2.5 SURFACE
Page 217 and 218: I- z W 0 w a a 100 80 60 40 20 215
Page 219 and 220: s., Literature Cited Berkley, C. ,
Page 221 and 222: 7 h \ F 221 600°C and 1 atmosphere
Page 223 and 224: 223 e I'
Page 225 and 226: R L ' -1 9mm O.D. 5mm I.D. 45mm 0.D
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Figure 5.- Paschen's law curves. 2-
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\ '? I The water-free product gases
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N I + 0" ON i I + 0 u / 0 0 I 0 cu
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- 233 SOME PROBLEMS OF THE KINETICS
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.. . :. ,. .I , . i ? .. . , ... .
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237 Table 2 Experimental Variables
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239 Zhbie I Eerccnt Consumption of
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241 Discussion The systematic varia
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I \ 1 243 FORMATION OF HYDROCARBONS
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h z - a o m a 20 T IME, minutes . F
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I 1 I I I I 0 I 2 3 4 5 TIME, minut
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The next five coluws in table 1 sho
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\ .\ t 251 Given the existence of t
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I L 253 Epple, R. P. and C. M. Apt.
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1 ' Fig. 1 Schematic of flow discha
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5' . ' I 1 257 co, with excess H2,
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1 1 1 moo 1400 1300 c V' I IPOO I I
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i 25i The Dlssocfatior of ToIuere V
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L ! , c PRODUCTS FROM A 28 MC. DISC
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'\ J ?. , .. . : PRODUCT FORMATION
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'9 / I '\ "1 BENZYL CATION AND RADI
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a
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271 tube serve? as the high voltare
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273 ion (1L.). Zxcitei-ion by colli
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Apparatus and Procedure 275 EXPERIM
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. 277 6. A freshly prepared sam le
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observed. The polystyrene (10% solu
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i i (12) c (11) (14) I 281 LITERATU
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FLOW- METER I ADDITIVE SUPPLY * ,28
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285 TABLE 2 Effect of Haloqenated A
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ANALYTICAL RESULTS Some evidence wa
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DISCUSSION 289 The salient features
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? ~ MENBERSHIP IN THE DIVISION OF F
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292 flow of the reactant gas stream
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294 have suitable residence times i
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0 E < h( E l! d K c 0 .- Y 0 t u t
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298 yields of many chemical product
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- ;i Y . 15. Pressure lOmm 5 > 10-
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302 the best and in many practical
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GENERATION AND MEASUREMENT OF AUDIO
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. The transformer secondary and the
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Vaccum-Tube Amplifier The mobile co
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310 f = Power supply frequency in c
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FUFARCI! INSTITUTE OF TFYDLC UNIVER
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J # I / 4) I . . '8 r4 0 r( P
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317 i Cuencb svsten w.nnar;itus use
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epcrte? the noss~kil.itv of nroduct
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1' b t +
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323 ....... - . . . . . . . . . . .
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1 \ i I i , / / / 8 3 1 325 To205 +
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- .- - - . - - . . . - . 327 n + c
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' POWER PLASMA GAS l e , ' I ! I I
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331 f'ENI?AL PF'FCLCCFC Dernis, P.R
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i J 333 ; mosphere (as opposed to a
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; it raised the question, still &?z
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p .I V I .= - - HCN/C(CALC. WITH C
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1 1 339 atmospheric ressure and ach
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RESULTS 341 Composition Dependence
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0.09 0.08 0.07 9 0.06 2 U - .$ 0.05
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II \ to the Slot So that less of th
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i 4 2 HYDROCARBON-NITROGEN REACTION
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I 1 349 c M m ; a e, k M x
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1.0 I - a. I n TEMPERATURE - OK Fig
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353 the experimental results in the
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,) 355 The ceaswed conversion cf ni
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1 6 357 Freezing. 3jpotnesise thzf
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359 \ Frozen Compositior: Calcillat
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I 1 \ 361 -. ne reaction proceecis
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\ 36 3 ' h, I 26. H. Purnell, Gas C
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In experiments on the direct conver
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367 used as blnders, with different
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369 ' i 1. REFERENCES Berber, John
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Distribution and yield rates of pro
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. . I . I 370 . . . . ., . . .. . .
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4 372 090- > E w - m c N O - 0 z :
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A-Feed tank 6-Thermocracker GReceiv
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80 \ 0 70 60 e 40 a U VI 9 30 20 10
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COAL DEASH& AND HIGH-PURITY COKE Wa
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3Pn _. -. - L -J:,J.-;~~~L, ):as se
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S ~ l ~ o n~pg:ading r is the resul
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The range ~f temperatures and gener
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. .. 386 9 * - r. Y 2 .' d a f' r.
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.) .L m 388 I
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TABLE 4 390 DELAYED COKING OF DEASH
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, ! I- on '---
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394 The present method is to keep t
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396 ‘c erperature, while the pres
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2, '! ! Proximate Analysis, wt $ Mo
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0 IS 0 14 LL 9 013 e \ 3 b- m *- 01
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402 HYDROGEN CYANIDE PRODUCED FROM
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404 Before startup, the system is p
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4 OL. ' , I. . TesCs. With.Coals .o
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Table 3.- Product Gas Analyses and
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410 BIBLIOGRAPHY 1. American Public
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Figure 2. Enclosure surrounding hyd
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0 0 f v) C 0 u m I z 2 c 2 r d J w
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0. E c .4 7 .. .c . I ( - Low tempe
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418 cual. A mjor aa\;antage or' the
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420 Ir ?Y ? ? 9 9 9 pc rod n o c o
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422 Table 3. Room-texperature M'dss
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424 state, depending on the strengt
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Table 4. Room-?;ergerature isomer s
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I' 1.3 . /o 9 IO 9 6 a 425 F F 33 I
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Brooks J.D. and Sternhell S. (1957)
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(52) Gib3 T.C. and Greenwood N.N. (
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434 transducer vas then introduced
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436 yield is quite similar. The con
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?-!??? 0 mv, Uh\OhIe . . . . eirlrl
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4. 5. 6. 7. 8. 9. 10. 11. 12. 13. 4
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442 CHEMICAL REACTIONS IN A CORONA
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helium 444 CORONA REACTOR SYSTEM Fi
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446 The ultraviolet spectrum. for t
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Biphenyl Fraction 448 The low molec
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LUd The actual structural definitio
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I I I I I In m 9 In 2 , I: r- In m
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’. 454 Mechanism I The available
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456 , , . The relatively low yield
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458 h/lethylacetylene, allene and b
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Introduction VAPOR PHASE DECOMPOSIT
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462 more efficient hydrogenation. T
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464 place in parallel with fragment
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466 P rl 0, k 7 rnI rn al k a I hl
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458 TABLE I. COMPOSI'IION OF GASEOU
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REFERENCES 1. C. Hirayama and D. A.
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i 472 Reciprocal Arc Enthalpy ,-> F
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474 be pumped down without altering
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476 Instead a hydrogen deficient fi
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i 478
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480 FATTY ACIDS AND n-ALKANES IN GR
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482 TA5L,E 2. - Carbon number distr
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6. 7. a. 9. 484 Lawlor, D. L., and
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' I ' Sample No. 6 ' 12 IO 8 6 z 4
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. 488 uiolecular weight of which ca
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Xississippi (Sample GS). Stock solu
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492 found at 5.7 and 4.9& for the W
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494 mechanisms. However, the voltad
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For pure polynuclcar arom.i;ic hydr
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- '-'. . ' . . values are listed in
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500 (1;) Ten, T. 17.: a;1d,Dic;
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- ~ Resistivity Czlculation 2: 1 j:
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504 o ' C 0s 2 0 v x i 8 2 0 ! P -
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506 i
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d 601 L P LL
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I I I I I I I I m W N W N 0 (D ? 0
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514 was heated under nitrogen in a
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The line broadening at 79OK of the
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13. 14. 15. 16. 17. 18. 19. 20. 21.
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W L, Z 6 m (1: 0 6 d j o 2 ' 1 0.0
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Coals 522 Studies of the 1600 cm-l
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L in ole i c a c id - 0' Two sample
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526 Table 1.- Ultimate analyses of
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528 6. Friedel, R. A., and H. Retco
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egeneration. The system can be seen
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532 and can be expressed in terms o
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534 in the vapor increases with inc
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NH3 NH3 NH3 NH3 Pyridine Pyridine P
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Mole Ratio of Test No. Quinoline to
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IXPROFJCTION D; M. Mason Institute
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-4:c~rciiny to recent studies o ;i4
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544 Table 1. LIGHT EMISSION OF Y"TR
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emission in a few cases may be by d
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LITERATUR2 CITED i. C. -. .' * il.
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co, CH,,OR 1 - OTHER ADDITIVE FRITT
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FRIT 'TED CO, CH,.OR 4 ___ OTHER AD
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340 350 300 400 4 50 500 600 700 80
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0 554 WITH COOLING (PLATE AT 40°C)
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5 56 then t = to when e = 0 2) the
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5 58 The surface heat transfer coef
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Discussion and Results 560 Three br
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__- ._ 562 Table I THERMAL AND PHYS
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ln 4 I 0 4J v \ 1.0 0.8 0.6 L - 0.4
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