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chemical physics of discharges - Argonne National Laboratory

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Mole Reaction Material<br />

ratio time efficiency<br />

BC13/H2 (min) (96 per pass)<br />

0.22 7.80<br />

0.19 5.0<br />

0. 12 10.0<br />

0.08 20.0<br />

Electrical<br />

efficiency<br />

(% per pms)<br />

0.046 1.2<br />

0.044 1. 1<br />

0. 06 1. 1<br />

0. 14 1.2<br />

As the mole ratio <strong>of</strong> BCl3 to hydrogen is increased from 0.22 to 0.66 (near 8toichiometric)<br />

and by reducing the hydrogen gas fl~w, the appearance <strong>of</strong> the glow and the character <strong>of</strong> the<br />

deposit are changed significantly. The hydrogen flow rate is an estimated value because<br />

the calibration curve does not extend to these low flowmeter readings. However by cutting<br />

the hydrogen flow rate in half, making the flow rate near stoichiometric for the reaction,<br />

the glow is intensified around the filament substrate and will migrate along the subatrate<br />

beyond the rf electrodes. The deposit character produced by this procedure ia shown in<br />

Fig. 40. These pictures show the types <strong>of</strong> deposita that are formed at different points on<br />

the substrate.<br />

The deposition rate ig significantly affected by the flow ratio a8 shown in Table W.<br />

Table IV<br />

EFFECT OF FLOW RATIO ON DEPOSITION RATE<br />

Mole flow ratio<br />

(miWmin)<br />

0.66 (est. )<br />

-- _. . . -_ __ _. - -

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