chemical physics of discharges - Argonne National Laboratory

chemical physics of discharges - Argonne National Laboratory chemical physics of discharges - Argonne National Laboratory

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LU \ If the electron temperature is equal to the ion temperature, as in the case of late in an afterglow, the ambipolar diffusion coefficient is just twice the value of D+. In the active discharge, however, as we have seen Te will be large, perhaps of the order of 30,000°K. On the other hand the ion temperature will deviate little from the neutral gas temperature. The reason is that the ion mass id compwable to the mass of the neutral molecules; thus by arguments similar to those leading to Eq. (7) the ion will in a single collision be able very effectively to give to the neutral gas the energy it picks up from the field between collisions. The temperature of the ions will therefore remain very close to the neutral gas temperature. The ratio Te/T+ will be of the order of 100 typically in an active discharge and rapid diffusion of the plasma through the neutra1,gas and to the walls of the container will result. Summary of the Remainder of the Paper C. Electron production and loss mechanisms are discussed and the plasma balance equation is formulated. D. Excitation to radiating and metaetable states is eumaarized and some of their consequences for the operation of a discharge are presented. E. Wall phenomena. 111. Macroscopic phenomena. A. Plasma polarization and the Debye length are discussed. -B. Characteristics of certain types of discharges are reviewed; Glow Discharges, Arc Discharges and rf discharges. IV. Afterglows. briefly reviewed. The effect8 of suddenly reducing the electron temperature are

i I i I I I ) ) i L , I I . INT1:ODtiCTIOfi 1l THE PRODIXTIOX OF 1\TOi.!S A::D SI:lTLL PJ$I)ICP.LS L< GLOW OISCIIARChS * Frederick Kaufman Department of Chemistry, University of Pittsburgh The size and topical variety of this symposiun clearly show tliat electrical discharges are finding increasing application in many areas of cliemistry ranging from tile iproduction of simple atoniic species such as 11, 0, or i from their diatomic molecules to the sviitiiesis or specific ueconposition of complex ory.anic or inorgsiiic ComPoUndS. It is unfortuiiately true that our understanding of tile chcmistrv of dis- cllarge processes is still in a rudimeoLary state, tiint the field is more an art than a science, and thus represents one of the last f'rontiers of chemistry. There is jiood reason for this unsatisfactory state of affairs. Glow disciiar- Res are complex phenomena in which gases at sul,-atmosplit!ric pressure are undergoing excitation and ionization by electron impact and so Give rise to hiziily uncquili- brated steadv-state conditions where the effective temperature of free electrons is typically tens of thousands OK, that of electronically or vibrationally excited States may be thousands of OK, whereas tiie transl.ationa1 and rotational temperature will only be teris to hundreds of '1; above ambient. It sliould be clear, of course, that apart from the processes occurring at tiie electrodes, energy from the electric field is coupled to the xas almost eiitirelv through the kinetic energy of free electrons wiiicli, due to their small mass, acquire eiiergv more rapidlv froni the field and lose it more slowly in elastic collisions (the mean fractional energy loss per elastic collision equals 2 ci/N in the siiiiplest clasical model where in and X are the masses of the electron and of the molecule). In tllis manner, electrons become suf- ficiently cnercetic to ionize some of the neutral species ana thereby balance their continuous loss by diffusion, attachment, and recombination. As the ionization potentials of most neutral gases are'in the 10 LO 20 ev range (230 to 460 kcal/mole), an appreciable fraction of the electrons has enough energy to produce electronic excitation (responsible for the emitted glow) and dissociation. In the following sections, the mechanism of dc and ac glow discharges will be briefly described, with emphasis on high frequency electrodeless discharges (f = lo6 to 1O1O sec-') and on the simple geometry often encountered in rapidly pumped steady- state flow systems at pressures near 1 torr. After a brief discussion of tile rates and energy dependence of specific collision and diffusion processes, available ex- perimental data will be brought to bear on the problem of H2, S2, and 02 dissociation and on the chemistry of some more complicated systems. Although there are several fine monographs available on electron impact plie- nomena and, discharge physics'-', thev contain relatively little information on active high frequency discharges which is pertinent to the problem of dissociation and chem- ical reaction. The electron physics of microwave discharges is discussed in some review articles. 5*6 XI. BASIC PtiYSICAL PROCESSES IT. 1. General Mechanism and Frequency Dependence. Glow discharges are typically observed in the pressure range of about 0.1 to 10 torr. .At much lower pressures, the electron mean free path is too long for gas collisions to be important, electrons pick up large amounts of energy from the dc or slow ac field and bomhard the anode or the tube wall which may then fluoresce. At * This work was supported by tiie National Science ?oundation /I

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THE PRODIXTIOX OF 1\TOi.!S A::D SI:lTLL PJ$I)ICP.LS L< GLOW OISCIIARChS<br />

*<br />

Frederick Kaufman<br />

Department <strong>of</strong> Chemistry, University <strong>of</strong> Pittsburgh<br />

The size and topical variety <strong>of</strong> this symposiun clearly show tliat electrical<br />

<strong>discharges</strong> are finding increasing application in many areas <strong>of</strong> cliemistry ranging<br />

from tile iproduction <strong>of</strong> simple atoniic species such as 11, 0, or i from their diatomic<br />

molecules to the sviitiiesis or specific ueconposition <strong>of</strong> complex ory.anic or inorgsiiic<br />

ComPoUndS. It is unfortuiiately true that our understanding <strong>of</strong> tile chcmistrv <strong>of</strong> dis-<br />

cllarge processes is still in a rudimeoLary state, tiint the field is more an art than<br />

a science, and thus represents one <strong>of</strong> the last f'rontiers <strong>of</strong> chemistry.<br />

There is jiood reason for this unsatisfactory state <strong>of</strong> affairs. Glow disciiar-<br />

Res are complex phenomena in which gases at sul,-atmosplit!ric pressure are undergoing<br />

excitation and ionization by electron impact and so Give rise to hiziily uncquili-<br />

brated steadv-state conditions where the effective temperature <strong>of</strong> free electrons is<br />

typically tens <strong>of</strong> thousands OK, that <strong>of</strong> electronically or vibrationally excited<br />

States may be thousands <strong>of</strong> OK, whereas tiie transl.ationa1 and rotational temperature<br />

will only be teris to hundreds <strong>of</strong> '1; above ambient. It sliould be clear, <strong>of</strong> course,<br />

that apart from the processes occurring at tiie electrodes, energy from the electric<br />

field is coupled to the xas almost eiitirelv through the kinetic energy <strong>of</strong> free<br />

electrons wiiicli, due to their small mass, acquire eiiergv more rapidlv froni the field<br />

and lose it more slowly in elastic collisions (the mean fractional energy loss per<br />

elastic collision equals 2 ci/N in the siiiiplest clasical model where in and X are the<br />

masses <strong>of</strong> the electron and <strong>of</strong> the molecule). In tllis manner, electrons become suf-<br />

ficiently cnercetic to ionize some <strong>of</strong> the neutral species ana thereby balance their<br />

continuous loss by diffusion, attachment, and recombination. As the ionization<br />

potentials <strong>of</strong> most neutral gases are'in the 10 LO 20 ev range (230 to 460 kcal/mole),<br />

an appreciable fraction <strong>of</strong> the electrons has enough energy to produce electronic<br />

excitation (responsible for the emitted glow) and dissociation.<br />

In the following sections, the mechanism <strong>of</strong> dc and ac glow <strong>discharges</strong> will be<br />

briefly described, with emphasis on high frequency electrodeless <strong>discharges</strong> (f = lo6<br />

to 1O1O sec-') and on the simple geometry <strong>of</strong>ten encountered in rapidly pumped steady-<br />

state flow systems at pressures near 1 torr. After a brief discussion <strong>of</strong> tile rates<br />

and energy dependence <strong>of</strong> specific collision and diffusion processes, available ex-<br />

perimental data will be brought to bear on the problem <strong>of</strong> H2, S2, and 02 dissociation<br />

and on the chemistry <strong>of</strong> some more complicated systems.<br />

Although there are several fine monographs available on electron impact plie-<br />

nomena and, discharge <strong>physics</strong>'-', thev contain relatively little information on active<br />

high frequency <strong>discharges</strong> which is pertinent to the problem <strong>of</strong> dissociation and chem-<br />

ical reaction. The electron <strong>physics</strong> <strong>of</strong> microwave <strong>discharges</strong> is discussed in some<br />

review articles. 5*6<br />

XI. BASIC PtiYSICAL PROCESSES<br />

IT. 1. General Mechanism and Frequency Dependence.<br />

Glow <strong>discharges</strong> are typically observed in the pressure range <strong>of</strong> about 0.1 to<br />

10 torr. .At much lower pressures, the electron mean free path is too long for gas<br />

collisions to be important, electrons pick up large amounts <strong>of</strong> energy from the dc or<br />

slow ac field and bomhard the anode or the tube wall which may then fluoresce. At<br />

* This work was supported by tiie <strong>National</strong> Science ?oundation<br />

/I

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