15/16 Fig.19: a) Kinetics of light-induced degradation for two single-junction a-Si:H p-i-n cells, for open circuit, short circuit and maximum power point conditions. Results are displayed as relative efficiencies (i.e. efficiency at time t over initial efficiency). Green points represent the degradation of the a-Si:H/a-Si:H tandem for comparison. b) Picture of the inside part of the new laser system installed in Dec. 08 at IMT. 5.3 Laser scribing A new versatile state-of-the-art lasering setup, whose specifications were defined together with an industrial partner, is been ramped at IMT. The system is equipped state-of-the-art laser sources All necessary wavelengths will be available (355, 532 and 1064). It should allow efficient and fast patterning of the P1, P2, and P3 scribes. The system will allow us to use either a movable beam or a movable sample for sizes up to 50x60 cm 2 . Its flexibility will make the system a powerful tool to work with a variety of laser sources and optics, at high speed. Collaboration and synergies with other projects Regular academic contacts/scientific and sample exchanges are maintained throughout the project both with national (CRPP-EPFL, EMPA, HE-Arc,..) and international entities (NREL in Golden, Colorado, University of Ljubljana, University of Patras, IPV Juelich, Academy of Science of Prague, ECN….). IMT continues to be involved into the European projects ATHLET and successfully concluded the FLEXCELLENCE project in October 08. IMT is also involved in the Swiss CCEM-CH Thin film PV project and in two other EU projects. A strong synergy is or could be realized between all these projects and this running SFOE project. National collaborations with industrial partners are ongoing, either in the frame of CTI projects or through direct mandates, e.g. with OC Oerlikon and VHF-Technologies, 3S and Pasan. Finally IMT was one of the main organiser of the symposium “Light Management in Photovoltaic Devices -Theory and Practice” at the spring MRS meeting 2008 in San Francisco, which encountered a very favourable echo in the PV community. Evaluation for 2008 / perspectives for <strong>2009</strong> In 2008, most of the quantitative targets for the first year described at the beginning of this report could be reached (or some are close to be achieved such as 8.3% instead of 8.5% stable for tandem a-Si/a- Si on glass). High initial efficiencies above 13.1% could be reported on glass, as well as more than 10% on glass but for n-i-p structures. Also two patents on innovative device structures could be applied for. In <strong>2009</strong>, several new fabrication tools will come in line and a major effort will be undertaken to improve further the processes, their reproducibility, and the materials quality. These systems should allow a faster device fabrication cycle time, with less process to process variability and should replace the generations of manual equipment at IMT. In parallel, in <strong>2009</strong> a major effort towards the realisation of superstrates and substrates ideal for the growth of micromorph cells will be undertaken, base on the replication processes or on innovative glass/TCO structures. 45/290 New processes and device structures for the fabrication of high efficiency thin film silicon photovoltaic modules, C. Ballif, University of Neuchâtel
Acknowledgements We thank all the PV-Lab collaborators who contributed to the results and documents used in for this report. We also thank D. Alexander, M. Dadras and M. Leboeuf for assistance in electron microscopy. References Most of these references acknowledge the SFOE support for the project 101191. Preprints of some papers can be downloading from www.unine.ch/pv. [Bue08] Conducting two-phase silicon oxide layers for thin-film silicon solar cells, Peter Buehlmann, Julien Bailat, Andrea Feltrin, Christophe Ballif, submitted to Prof. MRS meeting Boston 2008 [Bug08] Influence of Ion Bombardment on Microcrystalline Silicon Material Quality and Solar Cell Performance, G. Bugnon, A. Feltrin, F. Sculati-Meillaud, J.Bailat, C. Ballif, to be published in the Proc.33rd IEEE-PVSC Conf. San Diego 2008 [Cub08] LATEST RESULTS ON STABILIZED FLEXIBLE THIN FILM SILICON SOLAR CELLS, O. Cubero, T. Söderström, F.-J. Haug, V. Terrazzoni-Daudrix, X. Niquille, S. Perregaux, M. Raeis-Barneoud, C. Ballif”, Proc 23rd EU-PVSC Conference, Valencia (Spain), 2008 [Dom08] Optical management for high-efficiency thin-film silicon micromorph solar cells with an in situ silicon oxide based intermediate reflector, D. Dominé, P. Buehlmann, J. Bailat, A. Billet, A. Feltrin, C. Ballif, Rapid Research Letter 2 (2008) 163 [Dom08b] High-efficiency micromorph silicon solar cells with in-situ intermediate reflector deposited on various rough LPCVD ZnO, D. Dominé, P. Buehlmann, J. Bailat, A. Billet, A. Feltrin, and C. Ballif, Proc. 23rd EU-PVSEC, Valencia, Spain, 2008 [Fel08] Silane depletion dependent ion bombardment and material quality of microcrystalline silicon deposited by VHF-PECVD, A. Feltrin, G. Bugnon, F. Meillaud, J. Bailat, B. Strahm, C. Ballif, to be published in the Proc.33rd IEEE-PVSC Conf. San Diego 2008 [Fel08b] LOW POWER HIGH GROWTH RATE DEPOSITION OF MICROCRYSTALLINE SILICON, Andrea Feltrin, Grégory Bugnon, Fanny Meillaud, Julien Bailat*, Christophe Ballif, Proc. 23rd EU-PVSEC, Valencia, Spain, 2008 [Hau08B] Plasmonic absorption in textured silver back reflectors of thin film solar cells, F.-J. Haug, T. Söderström, O. Cubero, V. Terrazzoni-Daudrix, C. Ballif, Journal of Applied Physics, Vol 104, pp. -064509, September, 2008 [Ste07] Transition between grain boundary and intragrain scattering transport mechanisms in boron-doped zinc oxide thin films, J. Steinhauser, S. Faÿ, N. Oliveira, E. Vallat-Sauvain, C. Ballif. Applied Physics Letters , Vol 90, pp. 142107, 2007 [Ste08] Humid environment stability of LPCVD ZnO:B used as transparent electrodes in thin film silicon solar cells. Jérôme Steinhauser, Stefan Meyer, Marlène Schwab, Sylvie Faÿ, Christophe Ballif, U. Kroll, D. Borello. Presented in 2nd International Symposium on TCO , October, 2008, Hersonissos, Crete, Greece, submitted to Thin Solid Film [Kro06] U. Kroll, et al., Proceedings of the 21st European Photovoltaic Solar Energy Conference, Dresden, Germany, 1551, (2006). [Mei08] MICROMORPH CELLS GROWN AT HIGH RATE WITH IN-SITU INTERMEDIATE REFLECTOR IN INDUSTRIAL KAI PECVD REACTORS, Fanny Meillaud, Andrea Feltrin, Grégory Bugnon, Gaetano Parascandolo, Peter Buehlmann and Christophe Ballif, Proc. 23rd EU-PVSEC, Valencia, Spain, 2008 [Sod08] Optimization of amorphous silicon thin film solar cells for flexible photovoltaics, T. Söderström, F.-J. Haug, V. Terrazzoni-Daudrix, and C. Ballif Journal of Applied Physics , Vol 103 , pp. 114509-, 2008 [Sod08b] N/I buffer layer for substrate microcrystalline thin film silicon solar cell, T. Söderström, F.-J. Haug, V. Terrazzoni-Daudrix, X. Niquille, M. Python and C. Ballif JOURNAL OF APPLIED PHYSICS, Vol 104, pp. -104505, 2008 [Sod09] T. Söderström, to be presented at the 18 PVSEC, Calcutta, India, Jan. 09 46/290 New processes and device structures for the fabrication of high efficiency thin film silicon photovoltaic modules, C. Ballif, University of Neuchâtel 16/16
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