Programm Photovoltaik Ausgabe 2008 ... - Bundesamt für Energie BFE

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Figure 1: Vacuum deposition equipments used for upscaling of process steps: Inline Sputtering
equipment (Material Research Corporation) and absorber layer evaporator system (custom
build vacuum chamber and evaporation components
A further important aspect of large area solar cells is the integration of single cells to modules. Therefore
patterning of the layers is required. In this project the focus is set on large area uniformity of the
layers. Cell patterning and interconnection is made by using shadow masks during the layer deposition
steps.
Buffer layer deposition is conventionally done by the chemical bath method. Alternative methods are
also under investigation but are not in the scope of this project. Therefore deposition solution chemistry
was adapted from the small area cells while the deposition equipment needed complete redesign
to reduce waste materials. A vertical deposition container with laminar solution flow has been set up
and improved in a new configuration for large area CdS layer deposition.
Figure 2: Chemical bath with minimized solution requirement for large area deposition of buffer
layers by wet chemical processes.
The deposition of alternative back contacts for flexible substrates was made at external facilities using
standard sputtering equipment.
Large Area Flexible CIGS, D. Brémaud, ETHZ Seite 77 von 288