Programm Photovoltaik Ausgabe 2008 ... - Bundesamt für Energie BFE
Programm Photovoltaik Ausgabe 2008 ... - Bundesamt für Energie BFE Programm Photovoltaik Ausgabe 2008 ... - Bundesamt für Energie BFE
NAPOLYDE Département fédéral de l’environnement, des transports, de l’énergie et de la communication DETEC Office fédéral de l’énergie OFEN NANO-STRUCTURED POLYMER DEPOSITION PROCESSES FOR MASS PRODUCTION OF IN- NOVATIVE SYSTEMS FOR ENERGY PRODUC- TION & CONTROL AND FOR SMART DEVICES Annual Report 2007 Author and Co-Authors Dr. Toby Meyer, Andreas Meyer Institution / Company Solaronix SA Address Ouriette 129 CH-1170 Aubonne Telephone, E-mail, Homepage +41 (0) 21 821 22 80, toby@solaronix.com, www.solaronix.com Project- / Contract Number NMP2-CT-2005-515846 / SER N° 03.0111-2 Duration of the Project (from – to) 01.11.2003 – 31.10.2008 Date 05.02.2008 ABSTRACT NAPOLYDE consortium will develop new technologies for polymer or polymer-like films deposition at nano-scale precision supporting mass production and environmental friendly requirements. The work focuses on: 2 different scales (small and large surfaces) � Microelectronics, energy and bio-medical application � Roll-to-roll for steel and glass applications 2 different ways (wet and plasma) � Nanolayering (nanolayer and multilayer systems) � Nanoclustering (nanoparticle inclusions) � Nanotexturing (morphology control, from nodule-like to ribbon-like) Improved properties � Barrier properties (liquid, gas, improved corrosion protection) � Electrical properties � Anti-scratch films � Hydrophobic and hydrophilic properties � Antireflective, IR, UV protection Seite 135 von 288
Project Goals NAPOLYDE industrials aim to develop new technologies and processes with full control over the nanoscale for the mass production of new highly innovative products based on polymeric film and coatings with controlled nanoscale features (thickness, porosity, roughness, surface structures or inclusions such as nanoparticles) can provide systems with radically new chemical or physical properties. Among them barrier, mechanical protection, super-hydrophobicity, antireflectivity, conductivity are all the most industrially relevant. In addition, manipulation on the nanoscale of polymer thin films is a route to the miniaturization of functional micro devices. NAPOLYDE very much emphasizes the cost driven aspect for different types of components (large and small devices) and all the derived scientific issues like coating thickness are mirrored and bound to the severe requirements resulting from the enormous deposition speed (or very high throughput) in order to reach acceptance in volume markets. According to a first estimate for high volume products (e.g. coatings on steel) it can be said that under current production conditions (about 30 m/mn web speed or 15 wafers/h) the deposition PVD/CVD or Sol GEL layer has to be well below 1µm to get acceptance on the high volume market. The vision to reach the market with coatings under recent development one should have in mind is the “factor 4” rule: half the thickness should reach twice the quality of the “state of the art” coating. Concerning quality and thickness (at given production speed) NAPOLYDE very much profits from nano-science. Short description of the project The overall objectives of NAPOLYDE are: Two main industrial processes will be radically improved to get thin polymeric film on surfaces (two ranges will be considered: 1 mm² & >>1m²), wet deposition processes (i.e.: sol-gel, sonochemistry or self-assembly) and dry deposition processes (plasma CVD, sputtering etc) and to provide nanolayering, nanoclustering and nanotexturing of organic thin films in mass production: � Robust and scalable deposition technologies to master thin films characteristics (Thickness: Large surfaces with homogeneous precise thickness and chemical and physical properties, Composition: Inclusion of nano-particles inside films, film stochiometry and Surface geometry: to benefit from the specific properties of nanotextured surfaces). � Measurement instruments and design tools to control these high precision deposition technologies at industrial scale (in-situ continuous characterization tools for thickness and composition, simulation models…) � Scale-up methodologies and know-how to support new technologies introduction inside industrial process chains. Concerning nanoscale precision three main ideas will be explored (nanolayering, nanoclustering and nanotexturing) and the best solution (vs. costs, properties…) will be developed depending on the application. Some first examples are mentioned below: Multi Nano-layering Deposition of successive polymeric layer for combining different physical and chemical properties. The main challenge here will be the uniformity of the layer in term of thickness and composition, perfect control of each nanolayer uniformity and adhesion under mass production conditions: � PECVD (high density plasma, pulsed plasma or capacitive plasma): nanolayering of different organic thin films (SiOxCyNz, CFx, CHx) coupled with some planarization techniques will be investigated. � Wet: various combinations of crosslinked polymer and sol-gel matrix films will be deposited to reach either property gradients (e.g., refractive index gradients) or combinations of properties, such as enhanced optical (antireflective, IR, UV protection, etc.), sensing or anti-corrosion properties, in combination with other properties, such as scratch resistance, superhydrophibicity, etc). Nano-clustering: Dispersion/Incorporation in the polymeric and sol gel or plasma thin film(s) of nanosized building blocks such as nanoparticles (clusters, colloids, nanotubes). The main aim is here to reduce material density and improve the mechanical properties. Moreover embedded nanoparticles can also present optical or electromagnetic and barrier properties. The incorporation of nanoclusters for improved ionic conductivity PEO (polyethylene oxide) based solid polymer electrolytes will also be analysed. Seite 136 von 288 NAPOLYDE, T. Meyer, Solaronix 2/7
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NAPOLYDE<br />
Département fédéral de l’environnement,<br />
des transports, de l’énergie et de la communication DETEC<br />
Office fédéral de l’énergie OFEN<br />
NANO-STRUCTURED POLYMER DEPOSITION<br />
PROCESSES FOR MASS PRODUCTION OF IN-<br />
NOVATIVE SYSTEMS FOR ENERGY PRODUC-<br />
TION & CONTROL AND FOR SMART DEVICES<br />
Annual Report 2007<br />
Author and Co-Authors Dr. Toby Meyer, Andreas Meyer<br />
Institution / Company Solaronix SA<br />
Address Ouriette 129 CH-1170 Aubonne<br />
Telephone, E-mail, Homepage +41 (0) 21 821 22 80, toby@solaronix.com, www.solaronix.com<br />
Project- / Contract Number NMP2-CT-2005-515846 / SER N° 03.0111-2<br />
Duration of the Project (from – to) 01.11.2003 – 31.10.<strong>2008</strong><br />
Date 05.02.<strong>2008</strong><br />
ABSTRACT<br />
NAPOLYDE consortium will develop new technologies for polymer or polymer-like films deposition at<br />
nano-scale precision supporting mass production and environmental friendly requirements. The work<br />
focuses on:<br />
2 different scales (small and large surfaces)<br />
� Microelectronics, energy and bio-medical application<br />
� Roll-to-roll for steel and glass applications<br />
2 different ways (wet and plasma)<br />
� Nanolayering (nanolayer and multilayer systems)<br />
� Nanoclustering (nanoparticle inclusions)<br />
� Nanotexturing (morphology control, from nodule-like to ribbon-like)<br />
Improved properties<br />
� Barrier properties (liquid, gas, improved corrosion protection)<br />
� Electrical properties<br />
� Anti-scratch films<br />
� Hydrophobic and hydrophilic properties<br />
� Antireflective, IR, UV protection<br />
Seite 135 von 288
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