Damage formation and annealing studies of low energy ion implants ...

For interactions at the energies used in MEIS the nuclear events occur at distances of
the order of the screening length, so the scattering is not purely Coulombic and a
screening factor F, has to be applied. Screening functions are described in more detail in
section 2.2. For MEIS it is generally accepted that a function derived from the Molière
potential (26) is best (1, 2). Then F is given by,
4
3
0.
042Z1Z
2
F = 1−
(4.7)
E
for M1