Damage formation and annealing studies of low energy ion implants ...

Acknowledgements
There are many people who I need to thank and acknowledge for their
contribution towards this PhD. Firstly I need to thank my supervisor Professor Jaap van
den Berg for his help and support throughout the entire time we’ve worked together.
Many days and nights have been spent carrying out MEIS experiments and I am
grateful to all the staff at Daresbury who have helped along the way, Dr Paul Bailey, Dr
Tim Noakes, Dr Kevin Connell, Mark Pendleton, Paul Morrell and Brian Blackwell.
I am grateful to everybody who I worked with on the IMPULSE project. In
particular to Dr Thomas Feudal, Marc Herden and Daniel Gehre of AMD who provided
many implanted samples. The two collaborations that proved to be the most fruitful and
enjoyable were with Damiano Giubertoni and Massimo Bersani of ITC – IRST who
carried out many of the SIMS measurements presented here, and with Dr Luciana
Capello and Dr Till Metzger of the ESRF who carried out the X-ray studies presented
here. In addition L. Ottaviano, C. Bongiorno and Dr G. Mannino provided the EFTEM
images. Outside of the IMPULSE project Eric Collard and Dr Richard Goldberg of
Applied Materials provided Sb implanted samples. Dr Wilfred Vandervorst of IMEC
carried out some SIMS experiments. Salvatore Gennaro and Damiano Giubertoni of
ITC – IRST have provided the results of Hall effect measurements.
I need to thank other PhD students at Salford who I’ve had a lot of fun working
with. Andy Wooding, Mike Reading and Jiri Fiala have been a real help, particularly
helping out with many late night MEIS/DVD sessions. Phil Edmondson has carried out
the XTEM work presented here and has been helpful throughout the PhD in many
discussions, as has Kerry Abrams. I am especially grateful to my brother Dave Werner
for invaluable help in writing the code for the depth scale program.
Professor Dave Armour and Professor Peer Zalm have been very helpful in
discussions throughout the project, and have assisted with proof reading the thesis. Dr
George Wolstenholme has provided technical assistance and Professor George Carter
has made helpful suggestions. Dr Reza Valizeda has helped by carrying out some RBS
measurements.
Finally I need to thank some friends and my family for many things, including
encouragement, support and pretending to be interested in silicon implants. In no
particular order, Pete and Lesley Daniel, Mike and Lorna Smith, Matt and Sarah Stuart,
Hannah “Cushion” Groves, Melanie Shaw, Dr June Lashley, Clayre Fontaine, Chris
Morriss, Mum, Dad and Chloe “Pufa Fish” Werner.
xiv