Damage formation and annealing studies of low energy ion implants ...

Yield (couts per 5µC)
300
250
200
150
100
50
0
65 70 75 80 85 90 95 100
300
Energy (keV)
250
200
150
100
50
O
As depth scale conversion
183.2 - (2.44 x Energy) + (0.0052 x Energy 2 )
Si
0
-10 0 10
Depth (nm)
20 30 40
Figure 4.20 Example of conversion from an energy scale (top) to a depth scale (bottom).
Depth scales are specific to individual elements. For this example only the As peak (in red)
is correctly converted. The rest of the spectrum (dashed line) is effectively meaningless.
This depth scale calibration method matches the physical reality more closely
than the surface approximation method. For that reason it represents an improvement
over the surface approximation method. However the level of difference between the
two methods was seen to vary only by about 2-3% over a depth of 10 nm and this
confirms the validity of the surface approximation method. A plot of a 3 keV As asimplanted
is shown in Figure 4.21 calibrated by the surface approximation and depth
scale program showing the comparatively small difference between the methods.
94
As
Au