Biomedical Engineering – From Theory to Applications

Micro-Nano Technologies for Cell Manipulation and Subcellular Monitoring
Similarly, nozzle architectures can be implemented on pipette surfaces (Kometani et al.,
2003). Again, by combining etching and deposition FIB capabilities, a final nozzle of 220 nm
tip inner diameter can be tightly sculpted on the edges of a commercial glass pipette, as seen
in Figure 8 (bottom row). In this process, an initial polishing of the edges takes place to
subsequently facilitate a smooth deposition. The function generator designed for sculpting
this nozzle tapered a cone-like shell, from 1500 nm to 480 nm outer diameters and from 870
nm to 220 nm inner diameters. A cross-section view of the structure shows the sharp
interface between glass and DLC. Although values of interface strength were not reported
along with fabrication methodology, this approach could be sound for cellular handling.
We have mentioned earlier how the versatility of FIB milling and deposition is not only due
to the high position ability of the ion beam itself, but also to the high programmability of the
scanning lenses (magnetic fields). Coupled with design software, sophisticated 3dimensional
patterns can be sculpted at pipette edges, as seen in Figure 9 (Kometani et al.,
2005a, and 2006). Nanonets could be sculptured at the edges of pipettes (Kometani, 2005b)
(not shown), offering a singular approach to collecting 2µm polystyrene spheres submerged
in an aqueous environment.
Fig. 9. SEM images of nozzle architectures, after Kometani et al., 2005a 5, and 2006 6.
5 Reprinted with permission from Journal of Vacuum Science & Technology B: Microelectronics and Nanometer
Structures, Vol. 23, No. 1, pp. (298-301), Performance of nanomanipulator fabricated on glass capillary by
focused-ion-beam chemical vapor deposition, Kometani, R., Hoshino, T., Kondo, K., Kanda, K., Haruyama,
Y., Kaito, T., Fujita, J., Ishida, M., Ochiai Y., & Matsui, S. (2005) American Vacuum Society.
6 Reprinted from Microelectronic Engineering, Vol. 83, No. 4-9, , Kometani, R., Funabiki, R., Hoshino, T., Kanda,
K., Haruyama, Y., Kaito, T., Fujita, J., Ochiai, Y., & Matsui, S., Cell wall cutting tool and nano-net fabrication by
FIB-CVD for subcellular operations and analysis, pp. (1642-1645), (2006), with permission from Elsevier
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