Biomedical Engineering – From Theory to Applications

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Biomedical Engineering – From Theory to Applications
situ sources, results in the adsorption of gas molecules to the substrate, which leads to a
thermally-driven gas molecule disocciation. Finally, the unwanted dissociated species are
sputtered. Similarly to milling, implantation of both gallium ions and dissociated species are
likely to occur during deposition.
The reader is directed to the monograph on Focus Ion Beams by Lucille Giannuzzi and Fred
Stevie (Giannuzzi & Stevie, 2005) for a thorough and rigorous description of the technique.
Fig. 5. Schematic describing atomic processes during ion beam-promoted sputtering.
Fig. 6. Schematic describing atomic porcesses during ion-beam assistend gass deposition.
2.2 FIB micro-nano fabrication for customized pipettes
Fabrication of microinjection pipettes and micromanipulators with finely-controlled
piercing angles, nanometer polishing, and versatile tip geometries is the next step to