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Microring Resonator Channel Dropping Filters

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<strong>Microring</strong> <strong>Resonator</strong> <strong>Channel</strong><br />

<strong>Dropping</strong> <strong>Filters</strong><br />

Integrated Optics<br />

Nick Miller


Attributes of microring resonators for channel dropping<br />

• <strong>Microring</strong> and microdisk structures can potentially be used as efficient add-drop filters in an<br />

integrated optics device for wavelength division multiplexing (WDM). They are particularly<br />

attractive because of their small size may allow high density integration on a chip.<br />

• Ideally in an WDM communications system, only a single channel is “dropped” from the<br />

signal bus leaving the other channels unaffected. This can be accomplished with a microring<br />

filter if the ring is small enough that it resonates at only a single frequency within the WDM<br />

communication window. This is analogous to placing a short etalon in a laser cavity in order to<br />

transmit only a single wavelength in the lasing bandwidth.<br />

• If the microring resonator is constructed from an electrically controllable refractive index,<br />

then the add-drop filter can potentially be dynamically tuned or used for very fast modulation<br />

and/or switching.<br />

• Multiple microrings can be cascaded (or coupled) to achieve high order filter characteristics.


<strong>Microring</strong> resonator filter evanescently<br />

side coupled to signal bus<br />

The incident wave is s i , the transmitted<br />

wave is s t , the dropped wave is s d , and<br />

the added wave is s f .<br />

Wavelength response of the microring<br />

resonator filter at the drop port<br />

Coupled mode theory (dashed) vs. FDTD simulation (solid).<br />

Resonance peak occurs at 1.335um<br />

and the FSR is approximately 0.05um.<br />

B.E. Little, S.T. Chu, H. A. Haus, J. Foresi, and J. –P. Laine, “<strong>Microring</strong> <strong>Resonator</strong> <strong>Channel</strong><br />

<strong>Dropping</strong> <strong>Filters</strong>,” IEEE Journal of Lightwave Technology, 16 (6) pp.998-1005 (1997).


Determining the modes of the microring resonator cavity<br />

Solving the wave equation in a cylindrical index<br />

structure can be complicated. Often a conformal<br />

transformation is applied to the cylindrical index<br />

structure making it straight but with an<br />

exponential index distribution. [See Kraus for a<br />

explanation of the conformal transformation].<br />

Look at the transformed index distribution. The<br />

index for radial values less than the inner ring<br />

radius is always less than the core index.<br />

Therefore the ring provides TIR at the inner<br />

boundary and energy leaks inward. The wave<br />

equation solution is an eponentially decaying<br />

function like that of a typical slab waveguide.<br />

However, the index for radial values greater than<br />

the outer ring radius grows exponentially until it<br />

becomes greater than the core index. This<br />

means we have good guidance but longer have<br />

TIR. The wave equation solution for these radial<br />

values is a Hankel function with a complex<br />

propagation constant. These are leaky modes.<br />

M. Heiblum and J.H. Harris, “Analysis of curved optical waveguides by conformal<br />

transformation,” IEEE Journal of Quantum Electronics, 11 (2) pp.75-83 (1975).


Normalized fundamental TE mode profiles (top) and<br />

snapshots of the propagating E-fields (bottom)<br />

Bent waveguide<br />

Straight waveguide<br />

γ/k0 = 1.293 - j7.521x10-6 β/k0 = 1.314<br />

Contrast the bent and straight waveguides: 1. The guided mode in the straight waveguide is centered on<br />

the core while in the bent waveguide the mode favors the outer radial boundary. The effective index of<br />

the straight waveguide is real, while the effective index of the bent waveguide complex and hence leaky.<br />

K.R. Hiremath, R. Stoffer, M. Hammer, “Modeling of circular integrated optical microresonators by 2-D<br />

frequency domain coupled mode theory,” Optical Communications 257 pp.277-297 (2006).


Input signal<br />

Snapshots of the TE mode propagating E-fields<br />

as computed by coupled mode theory<br />

Off-resonance wavelength At resonance wavelength<br />

These snapshots show the small energy in the ring cavity off resonance contrasted with the energy built<br />

up in the cavity at resonance. (Note the energy in the cavity is considerably greater than that of the<br />

input straight waveguide). At resonance energy also couples (i.e. is dropped) into the lower left guide.<br />

K.R. Hiremath, R. Stoffer, M. Hammer, “Modeling of circular integrated optical microresonators by 2-D<br />

frequency domain coupled mode theory,” Optical Communications 257 pp.277-297 (2006).


<strong>Microring</strong> vs. microdisk resonators<br />

• A disk structure, like a ring, can support multiple azimuthal resonant<br />

modes. However, the disk will additionally support multiple radial modes.<br />

These radial modes are concentrated about the circumference of the disk<br />

and are also known as whispering gallery modes (WGM).<br />

D.R. Rowland and J.D. Love, “Evanescent wave coupling of whispering gallery<br />

modes of a dielectric cylinder,” IEE Proceedings-J 140 (3) pp.177-188 (1993).


Examples of microdisk resonators<br />

Layer description of an SOI<br />

microdisk resonator filter<br />

SEM picture of a symmetric add-drop<br />

filter before the overlaying box is grown.<br />

A. Morand, Y. Zhang, B. Martin, K. Phan-Huy, D. Amans, and P. Benech, “Ultra-compact microdisk<br />

resonator filters on SOI substrate,” Optics Express, 14 (26) pp.12814-12821 (2006).


• A ring structure can be designed to support only a single resonant<br />

modes within a particular communications bandwidth. If a disk of equal<br />

outer radius is substituted for the ring, it will most probably support multiple<br />

radial modes within the communications bandwidth. However, it can be<br />

shown (next slide) that these multiple modes are not normally a problem.<br />

TE 0, TE 1, TE 2, and TE 3 whispering gallery modes. (R = 5μm)<br />

Radial mode profile (top), Snapshot of propagating E-field (bottom)<br />

K.R. Hiremath, R. Stoffer, M. Hammer, “Modeling of circular integrated optical microresonators by 2-D<br />

frequency domain coupled mode theory,” Optical Communications 257 pp.277-297 (2006).


• Despite a disk structure having multiple radial modes, the disk may be<br />

appropriate for a resonator filter because only the desired fundamental mode<br />

is efficiently excited due to the poor overlap with higher radial-order modes.<br />

Snapshot of propagating E-field in the microdisk filter at the minor<br />

TE 1 resonance (left) and at the major TE 0 ,resonance (right)<br />

Observe a significant transmitted E-field at the minor resonance while the<br />

transmitted E-field is almost fully rejected at the major resonance.<br />

K.R. Hiremath, R. Stoffer, M. Hammer, “Modeling of circular integrated optical microresonators by 2-D<br />

frequency domain coupled mode theory,” Optical Communications 257 pp.277-297 (2006).


Tuning a microring resonator filter<br />

The frequency response of a microring resonator filter is determined by the<br />

microring’s diameter and core index (relative to the clad index)<br />

If the microring resonator is constructed from an electrically controllable refractive<br />

index, then the add-drop filter can potentially be dynamically tuned or used for very<br />

fast modulation and/or switching.<br />

If one requires static channel dropping of a few wavelengths from an optical signal<br />

bus, multiple microring resonators (one for each desired drop channel) can be used.


1x3 add-drop filter<br />

The microdisk filter add-drops specific frequencies based on the microdisk diameter. Below is<br />

an SEM picture of a 1X3 add-drop filter composed of three microdisks, each of slightly different<br />

diameter. The plot at the lower right is the frequency response of this 1x3 filter. Note the FSR of<br />

a single filter is approximately 5nm and that the separation between ports is approximately 2nm.<br />

P. Koonath, T. Indukuri, and Bahram Jalali, “Add-drop filters utilizing vertically coupled microdisk resonators in<br />

silicon,” Applied Physics Letters, 86 091102 (2005).


Method for adjusting coupling into a microdisk resonator<br />

The coupling of a straight waveguide to a microdisk resonator can be adjusted by varying the<br />

distance between the straight waveguide and the microdisk resonator (in this case by a MEMs<br />

actuator).<br />

M.M. Lee, M.C. Wu, “Tunable coupling regimes of silicon microdisk resonators<br />

using MEMS actuators,” Optics Express, 14 (11) pp.4703-4712 (2006).


Method for adjusting coupling into a microdisk resonator<br />

M.M. Lee, M.C. Wu, “Tunable coupling regimes of silicon microdisk resonators<br />

using MEMS actuators,” Optics Express, 14 (11) pp.4703-4712 (2006).


Method for adjusting coupling into a microdisk resonator<br />

Transmission spectra for under, over, and critically coupled resonators<br />

Without bias, the waveguide remains straight and the<br />

coupling coefficient with the WGM modes of the microdisk<br />

is negligible. The resonator is under-coupled (a).<br />

Increasing applied voltage bends the waveguide towards<br />

the microdisk thereby increasing the coupling coefficient.<br />

The coupling coefficient gradually increases until it equals<br />

the round-trip resonator loss, causing the transmission to<br />

drop precipitously at the resonant wavelength. The<br />

resonator is now critically-coupled (b).<br />

Further increases of the applied voltage results in a still<br />

greater coupling coefficient causing the transmission<br />

intensity of increase. The resonator is over-coupled (c).<br />

M.M. Lee, M.C. Wu, “Tunable coupling regimes of silicon microdisk resonators<br />

using MEMS actuators,” Optics Express, 14 (11) pp.4703-4712 (2006).


Transmission curve for microdisk-coupled<br />

waveguide at its resonant wavelength<br />

M.M. Lee, M.C. Wu, “Tunable coupling regimes of silicon microdisk resonators<br />

using MEMS actuators,” Optics Express, 14 (11) pp.4703-4712 (2006).


Multiple microrings used to achieve high order filter characteristics<br />

Because microring resonators are so compact, multiple rings can be combined to construct higher<br />

order filters to meet various frequency response requirements.<br />

Multiple microring resonators<br />

(b) Cascaded resonators<br />

(c) Coupled resonators<br />

Spectra of filters composed of one,<br />

two, and three coupled microrings<br />

B.E. Little, S.T. Chu, H. A. Haus, J. Foresi, and J. –P. Laine, “<strong>Microring</strong> <strong>Resonator</strong> <strong>Channel</strong><br />

<strong>Dropping</strong> <strong>Filters</strong>,” IEEE Journal of Lightwave Technology, 16 (6) pp.998-1005 (1997).


<strong>Microring</strong> outer diameter [μm]<br />

9<br />

8<br />

7<br />

6<br />

5<br />

4<br />

3<br />

2<br />

1<br />

Microdisk fabrication limitations<br />

High Q WGM microdisk resonators require a<br />

Large indices make the microdisk sensitive to<br />

large index differential for efficient guiding and<br />

surface roughness and cylindricity which are limited<br />

are therefore often constructed from III-V or<br />

by the low tolerance lithography processes.<br />

silicon semiconductor materials. SEM micrograph of a R=2.5mm Si microdisk<br />

R<br />

min<br />

=<br />

8<br />

⎡<br />

⎢⎣<br />

0<br />

1<br />

n 2 2<br />

core<br />

nclad<br />

( ) − ) − ( ) ⎤<br />

n 1 arccos<br />

clad<br />

ncore<br />

⎥⎦<br />

M. Heiblum and J.H. Harris, “Analysis of curved optical<br />

waveguides by conformal transformation,” IEEE Journal<br />

of Quantum Electronics, 11 (2) pp.75-83 (1975).<br />

Rmin equation is plotted below to demonstrate the<br />

small microdisks require a high index contrast.<br />

Minimum diameter waveguide microring for λ = 1.0 μm<br />

0<br />

0 0.2 0.4 0.6 0.8 1 1.2 1.4 1.6 1.8 2<br />

<strong>Microring</strong>-to-cladding index difference [Δn]<br />

λ<br />

(a) Sideview showing SiO2 undercut and pedestal.<br />

(b) Top view of disk. (c) Top-edge zoom-in showing<br />

roughness. (d) Plot of radius variation vs. arc length<br />

M. Borselli, K. Srinivasan, P.E. Barclay, and O.<br />

Painter, “Rayleigh scattering, mode coupling, and<br />

optical loss in silicon microdisks,” Applied Physics<br />

Letters, 85 (17) pp.3693-3695 (2004).


Microdisk fabrication limitations<br />

Another major fabrication hurdle to using microdisks in resonator filters is ensuring<br />

reproducibility of the microdisk-to-waveguide coupling.<br />

To address the problem of coupling reproducibility, vertically coupled devices have been<br />

constructed where the coupling region is defined mainly by layer thickness (which can be<br />

precisely controlled by methods such as epitaxial crystal growth) as opposed to lithography.<br />

SEM picture of a microdisk resonator on the top<br />

silicon layer with linear bus waveguides underneath<br />

P. Koonath, T. Indukuri, and Bahram Jalali, “Add-drop filters utilizing vertically coupled microdisk<br />

resonators in silicon,” Applied Physics Letters, 86 091102 (2005).


Modeling microring resonator channel dropping filters<br />

I attempted to duplicate the results of the paper,<br />

B.E. Little, S.T. Chu, H. A. Haus, J. Foresi, and J. –P. Laine, “<strong>Microring</strong> <strong>Resonator</strong> <strong>Channel</strong> <strong>Dropping</strong><br />

<strong>Filters</strong>,” IEEE Journal of Lightwave Technology, 16 (6) pp.998-1005 (1997).<br />

The authors used coupled mode theory to predict the operation of the microring resonator filter<br />

and verified it using FDTD analysis. I repeated the FDTD simulation using the FDTD simulation<br />

tool from Lights. The microring resonator structure used in the FDTD simulation is as follows:<br />

•Ring and bus indices, n g = 3.0 surrounded by air, index n air = 1.0.<br />

•The ring and bus waveguide widths are both 0.2 μm.<br />

•The ring has an outer radius of 1.8 μm and the separation<br />

between the ring and the bus is 0.2 μm.<br />

•The FDTD analysis meshes the microring resonator add-drop<br />

filter shown at the right. The square mesh contains 540 by 540<br />

elements, each 10nm on a side. Using the 1-D waveguide mode<br />

solver, the fundamental mode E-field is placed near the bottom of<br />

the bus waveguide at the right.


Results for the microring resonator channel dropping filter<br />

I ran many FDTD simulations, but present only three results.<br />

1. The microring resonator was operated using the at-resonance wavelength of<br />

1.335μm. The FDTD simulation confirms that this structure does provide a<br />

channel dropping function at this wavelength.<br />

2. The same microring resonator was operated using the off-resonance<br />

wavelength of 1.315μm. The FDTD simulation shows that the structure does<br />

not resonate at this wavelength and therefore not drop a channel.<br />

3. A microdisk resonator was modeled (using the same outer radius as the<br />

microring resonator) and operated at a wavelength of 1.335μm. This simulation<br />

confirmed that the whispering gallery modes (WGMs) of microdisk resonator<br />

allow the microdisk to function similarly to the microring resonator.


Numerical FDTD simulation of the microring<br />

structure at resonance.<br />

This .mpeg shows the field<br />

profile based on the FDTD file<br />

“Nicksp12” on Lights.<br />

The FDTD simulation becomes<br />

unstable after approximately<br />

100um propagation time, as is<br />

visible in the movie.<br />

If the FDTD simulation ran<br />

longer, we would expect to see<br />

a much greater energy build up<br />

in the ring cavity, and close to<br />

100% drop channel efficiency.


<strong>Microring</strong> resonator drop filter at resonance<br />

This plot shows the power along<br />

the lower edge based on the<br />

FDTD file “Nicksp12” on Lights.<br />

Because the FDTD simulation<br />

becomes unstable after<br />

approximately 100μm, energy at<br />

the drop channel (shown by the<br />

small bump on the left) is not<br />

nearly 100% as expected.


Numerical FDTD simulation of the microring<br />

structure off resonance.<br />

This .mpeg shows the field<br />

profile based on the FDTD file<br />

“Nicksp10” on Lights.<br />

Again, the FDTD simulation<br />

becomes unstable after<br />

approximately 100μm time.<br />

If the FDTD simulation ran<br />

longer, we would expect to see<br />

little build up of energy in the<br />

ring cavity and continued poor<br />

drop channel efficiency.


<strong>Microring</strong> resonator drop filter off resonance<br />

This plot shows the power along<br />

the lower edge based on the<br />

FDTD file “Nicksp10” on Lights.<br />

Because we are off resonance,<br />

no drop energy is visible at the<br />

drop channel at the lower left.


Microdisk resonator structure used in a<br />

numerical FDTD simulation<br />

• Ring and bus indices, n g = 3.0 surrounded by air, index<br />

n air = 1.0.<br />

• The bus waveguide width is 0.2 μm.<br />

• The disk has an outer radius of 1.8 μm and the<br />

separation between the disk and the bus is 0.2 μm.<br />

• The FDTD analysis meshes the microdisk resonator adddrop<br />

filter shown at the right. The square mesh contains<br />

540 by 540 elements, each 10nm on a side. Using the 1-<br />

D waveguide mode solver, the fundamental mode E-field<br />

is placed near the bottom of the right hand bus waveguide.


Numerical FDTD simulation of the microdisk<br />

structure at resonance.<br />

This .mpeg shows the field<br />

profile based on the FDTD file<br />

“Nicksp7” on Lights.<br />

Again, the FDTD simulation<br />

becomes unstable after<br />

approximately 100um time. If<br />

the FDTD simulation ran longer,<br />

we would expect to see a much<br />

greater energy build up in the<br />

disk cavity, and much higher<br />

drop channel efficiency. Also<br />

note the multiple (perhaps two)<br />

radial modes visible inside the<br />

disk cavity.


Microdisk resonator drop filter near resonance<br />

This plot shows the power along<br />

the lower edge based on the<br />

FDTD file “Nicksp7” on Lights.<br />

Because the FDTD simulation<br />

becomes unstable after<br />

approximately 100um, energy at<br />

the drop channel (shown by the<br />

small bump on the left) is quite<br />

small. However, it is also<br />

smaller than the microring case<br />

probably because we are<br />

operating slightly off the<br />

resonance peak.


REFERENCES<br />

[1] B.E. Little, S.T. Chu, H. A. Haus, J. Foresi, and J. –P. Laine, “<strong>Microring</strong> <strong>Resonator</strong> <strong>Channel</strong> <strong>Dropping</strong><br />

<strong>Filters</strong>,” IEEE Journal of Lightwave Technology, 16 (6) pp.998-1005 (1997).<br />

[2] K.R. Hiremath, R. Stoffer, M. Hammer, “Modeling of circular integrated optical microresonators by 2-D<br />

frequency domain coupled mode theory,” Optical Communications 257 pp.277-297 (2006).<br />

[3] D.R. Rowland and J.D. Love, “Evanescent wave coupling of whispering gallery modes of a dielectric<br />

cylinder,” IEE Proceedings-J 140 (3) pp.177-188 (1993).<br />

[4] P. Koonath, T. Indukuri, and Bahram Jalali, “Add-drop filters utilizing vertically coupled microdisk<br />

resonators in silicon,” Applied Physics Letters, 86 091102 (2005).<br />

[5] K.H. Vahala, “Optical Microcavities,” Nature 424 pp.839-846 (2003).<br />

[6] M. Heiblum and J.H. Harris, “Analysis of curved optical waveguides by conformal transformation,”<br />

IEEE Journal of Quantum Electronics, 11 (2) pp.75-83 (1975).<br />

[7] M.M. Lee, M.C. Wu, “Tunable coupling regimes of silicon microdisk resonators using MEMS<br />

actuators,” Optics Express, 14 (11) pp.4703-4712 (2006).<br />

[8] A. Morand, K. Phan-Huy, Y. Desieres, and P. Benech, “Analytical study of the microdisk’s resonant<br />

modes coupling with a waveguide based on the perturbation theory,” IEEE Journal of<br />

Lightwave Technology, 22 (3) pp.827-832 (2004).<br />

[9] A. Morand, Y. Zhang, B. Martin, K. Phan-Huy, D. Amans, and P. Benech, “Ultra-compact microdisk<br />

resonator filters on SOI substrate,” Optics Express, 14 (26) pp.12814-12821 (2006).<br />

[10] M. Borselli, K. Srinivasan, P.E. Barclay, and O. Painter, “Rayleigh scattering, mode coupling, and<br />

optical loss in silicon microdisks,” Applied Physics Letters, 85 (17) pp.3693-3695 (2004).<br />

[11] Kraus, J.D., Electromagnetics, McGraw-Hill, New York, 1953.

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