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A SURVEY OF SEMICONDUCTOR DEVICES

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IEEE EDS Distinguished Lecture<br />

A <strong>SURVEY</strong> <strong>OF</strong> <strong>SEMICONDUCTOR</strong> <strong>DEVICES</strong><br />

N.C. A&T State University<br />

Greensboro, NC<br />

Jan. 28, 2011<br />

Kwok Ng<br />

Sr. Director<br />

Semiconductor Research Corp (SRC)<br />

Research Triangle Park, N. Carolina<br />

1/39 K. Ng


K. K. Ng, Complete Guide to Semiconductor Devices, 2nd Ed.,<br />

Wiley/IEEE Press, 2002.


BASIC ELECTRONIC COMPONENTS<br />

L ---------------- DIFFERENTIATOR V L , STABILIZE I<br />

dI<br />

= ---dt<br />

1<br />

C ---------------- INTEGRATOR V = --- I dt,<br />

STABILIZE V<br />

C∫<br />

R ---------------- DEVELOP VOLTAGE DROP, RESISTS I<br />

DIODE --------- RECTIFIER, NON-LINEAR, LOGIC (LIMITED)<br />

TRANSISTOR----- LOGIC, AMPLIFICATION<br />

3/39 K. Ng


WHY IS TRANSISTOR THAT USEFUL?<br />

1. TRANSFER-RESISTOR => AMPLIFICATION<br />

(DIODE CAN’T)<br />

2. 3-TERMINAL => INPUT/OUTPUT ISOLATION<br />

(DIODE CAN’T)<br />

3. INVERTER (MUST FOR DIGITAL CIRCUITS, DIODE CAN’T)<br />

IN OUT<br />

IN OUT<br />

4/39 K. Ng


HOW VACUUM TUBES WORK<br />

HEATER<br />

I<br />

ELECTRONS<br />

CATHODE<br />

SCL CURRENT<br />

ANODE<br />

VACUUM<br />

GLASS TUBE<br />

T2 > T1<br />

T1<br />

TEMP.-LIMITED<br />

CURRENT<br />

V<br />

V<br />

5/39 K. Ng


IP<br />

PLATE<br />

CATHODE<br />

T2 > T1<br />

T 1<br />

V P<br />

TEMP-LIMITED<br />

CURRENT<br />

SCL CURRENT<br />

V P<br />

VG<br />

GRID<br />

IP VG = 0<br />

VACUUM TUBES<br />

DIODE TUBE TRIODE TUBE TETRODE TUBE PENTODE TUBE<br />

PLATE<br />

CATHODE<br />

V G < 0<br />

V P<br />

VP<br />

VG<br />

IP<br />

GRID<br />

CATHODE<br />

PLATE<br />

VG = 0<br />

V P<br />

V P<br />

SCREEN<br />

VG < 0<br />

SUPPRESSOR<br />

GRID<br />

VG<br />

IP<br />

PLATE<br />

CATHODE<br />

VG = 0<br />

VG < 0<br />

V P<br />

VP<br />

SCREEN<br />

6/39 K. Ng


HIGH POWER DISSIPATION<br />

LOW RELIABILITY<br />

LARGE SIZE<br />

After S. M. Sze<br />

PROBLEMS <strong>OF</strong> VACUUM TUBES<br />

LOW POWER DISSIPATION<br />

HIGH RELIABILITY<br />

SMALL SIZE<br />

TRANSISTOR<br />

SOLUTION<br />

7/39 K. Ng


10 18 10 16 10 14 10 12 10 10 10 8 10 6 10 4 10 2 1 10 –2 10 –4 10 –6 10 –8<br />

SULFUR<br />

DIAMOND (PURE)<br />

FUSED QUARTZ<br />

WHAT IS <strong>SEMICONDUCTOR</strong>?<br />

GLASS<br />

NICKEL OXIDE (PURE)<br />

RESISTIVITY ρ (Ω-cm)<br />

GERMANIUM (Ge)<br />

SILICON (Si)<br />

GALLIUM ARSENIDE (GaAs)<br />

GALLIUM PHOSPHIDE (GaP)<br />

CADMIUM SULFIDE (CdS)<br />

SILVER<br />

COPPER<br />

ALUMINUM<br />

PLATINUM<br />

BISMUTH<br />

10–18 10–16 10–14 10–12 10–10 10–8 10–6 10–4 10–2 1 102 104 106 108<br />

CONDUCTIVITY σ (S/cm)<br />

INSULATOR <strong>SEMICONDUCTOR</strong><br />

0.1 eV < Eg < 4 eV<br />

METAL<br />

8/39 K. Ng


WHY IS <strong>SEMICONDUCTOR</strong> USEFUL?<br />

SOLID STATE, SINGLE CRYSTAL (RELIABILITY, DENSITY)<br />

GOOD CONDUCTIVITY (VARIABLE)<br />

DOPING CAN BE DEPLETED => SPACE CHARGE => POTENTIAL BARRIER<br />

(NOT IN METAL)<br />

FIELD CAN PENETRATE (NOT IN METAL)<br />

ENERGY GAP => PHOTONIC <strong>DEVICES</strong> (NOT IN METAL)<br />

ELIMINATE<br />

VACUUM TUBE<br />

ELIMINATE<br />

INSULATOR<br />

ELIMINATE<br />

METAL<br />

9/39 K. Ng


p-n JUNCTION FIELD-EFFECT TRANSISTOR<br />

LED LASER SOLAR<br />

CELL TUNNEL p-n<br />

DIODE DIODE MOSFET MESFET MODFET<br />

ZENER<br />

DIODE<br />

<strong>SEMICONDUCTOR</strong> DEVICE HIERARCHY: device vs. variation<br />

VARACTOR TFT DMOS<br />

≈ 77<br />

MAJOR<br />

<strong>DEVICES</strong><br />

≈ 120<br />

RELATED<br />

<strong>DEVICES</strong><br />

10/39 K. Ng


Examples:<br />

Some are device variations<br />

III-V MOSFET, CNT FET, graphene FET<br />

These are variations of channel materials for MOSFET.<br />

Examples:<br />

Some are not “Semiconductor” devices<br />

Single-electron transistor<br />

Molecular devices<br />

Spintronics<br />

Polymer devices<br />

MEMS (micro-electro-mechanical system)<br />

etc<br />

11/39 K. Ng


Device vs. Circuit<br />

Device: parts cannot be reconnected by wire<br />

Bipolar transistor<br />

MOSFET<br />

Device Circuit<br />

n<br />

p<br />

n<br />

n<br />

p<br />

n p<br />

n + p n<br />

p<br />

+ n + n +<br />

CMOS inverter<br />

p-MOS<br />

n-MOS<br />

CMOS detector (no gain as<br />

phototransistor)<br />

Detector MOSFET<br />

12/39 K. Ng


“All it Takes is Concentration”


<strong>SEMICONDUCTOR</strong>-DEVICE CLASSIFICATION<br />

1.Diodes Rectifiers<br />

Neg Resist N-shape<br />

S-shape<br />

Transit-Time<br />

2.Resistive/Capacitive Devices<br />

3.Transistors FET<br />

PET<br />

4.Nonvolatile Memories<br />

5.Thyristors and Power<br />

6.Photonics Light Sources<br />

Photodetectors<br />

Bistable Opt Dev<br />

Others<br />

7.Sensors<br />

14/39 K. Ng


American Heritage<br />

WHAT IS DIODE?<br />

“An electronic device that restricts current flow chiefly to one direction”<br />

Webster’s<br />

“A rectifier that consists of a semiconducting crystal with two terminals and that is<br />

analogous in use to an electron tube diode.”<br />

Inconsistent devices:<br />

I<br />

New IEEE Standard Dictionary of Electrical and Electronics Terms<br />

V f<br />

TUNNEL DIODE<br />

“A semiconductor device having two terminals and exhibiting a nonlinear voltagecurrent<br />

characteristics”<br />

I<br />

GUNN DIODE<br />

V<br />

15/39 K. Ng


1.Diodes Rectifiers<br />

Neg Resist N-shape<br />

S-shape<br />

Transit-Time<br />

2.Resistive/Capacitive Devices<br />

3.Transistors FET<br />

PET<br />

4.Nonvolatile Memories<br />

5.Thyristors and Power<br />

6.Photonics Light Sources<br />

Photodetectors<br />

Bistable Opt Dev<br />

Others<br />

7.Sensors<br />

1. p-n Diode<br />

2. Schottky-Barrier<br />

Diode<br />

3. Planar-Doped-<br />

Barrier Diode<br />

δ-doped-,<br />

pulse-doped-,<br />

triangularbarrier<br />

4. Isotype<br />

Heterojunction<br />

5. p-i-n Diode<br />

p<br />

n<br />

n<br />

RF R<br />

VBD<br />

16/39 K. Ng<br />

I<br />

DC I<br />

Vf


1.Diodes Rectifiers<br />

Neg Resist N-shape<br />

S-shape<br />

Transit-Time<br />

2.Resistive/Capacitive Devices<br />

3.Transistors FET<br />

PET<br />

4.Nonvolatile Memories<br />

5.Thyristors and Power<br />

6.Photonics Light Sources<br />

Photodetectors<br />

Bistable Opt Dev<br />

Others<br />

7.Sensors<br />

1. Tunnel Diode<br />

2. Transferred-<br />

Electron Device,<br />

Gunn diode<br />

3. Resonant-<br />

Tunneling Diode<br />

4. Resonant-<br />

Interband<br />

Tunneling Diode<br />

5. Real-Space-<br />

Transfer Diode<br />

6. Single-Barrier<br />

Tunnel Diode<br />

7. Single-Barrier<br />

Interband-<br />

Tunneling Diode<br />

E<br />

GaAs<br />

E EC<br />

EV<br />

k<br />

AlGaAs<br />

I<br />

dI/dV =<br />

NEGATIVE<br />

V f<br />

17/39 K. Ng


1.Diodes Rectifiers<br />

Neg Resist N-shape<br />

S-shape<br />

Transit-Time<br />

2.Resistive/Capacitive Devices<br />

3.Transistors FET<br />

PET<br />

4.Nonvolatile Memories<br />

5.Thyristors and Power<br />

6.Photonics Light Sources<br />

Photodetectors<br />

Bistable Opt Dev<br />

Others<br />

7.Sensors<br />

1. MIS Switch (MISS)<br />

2. Planar-Doped-<br />

Barrier Switch<br />

3. Amorphous<br />

Threshold Switch<br />

Ovonic<br />

threshold switch<br />

4. Heterostructure<br />

Hot-Electron Diode<br />

n<br />

p<br />

I<br />

V<br />

18/39 K. Ng


1.Diodes Rectifiers<br />

Neg Resist N-shape<br />

S-shape<br />

Transit-Time<br />

2.Resistive/Capacitive Devices<br />

3.Transistors FET<br />

PET<br />

4.Nonvolatile Memories<br />

5.Thyristors and Power<br />

6.Photonics Light Sources<br />

Photodetectors<br />

Bistable Opt Dev<br />

Others<br />

7.Sensors<br />

1. IMPATT Diode<br />

Read diode<br />

2. BARITT Diode<br />

Punchthrough<br />

diode<br />

p+ n i n+<br />

AVA<br />

n<br />

DRIFT<br />

p<br />

i·v = NEGATIVE<br />

V<br />

I<br />

19/39 K. Ng<br />

t<br />

t


1.Diodes Rectifiers<br />

Neg Resist N-shape<br />

S-shape<br />

Transit-Time<br />

2.Resistive/Capacitive Devices<br />

3.Transistors FET<br />

PET<br />

4.Nonvolatile Memories<br />

5.Thyristors and Power<br />

6.Photonics Light Sources<br />

Photodetectors<br />

Bistable Opt Dev<br />

Others<br />

7.Sensors<br />

1. Resistor<br />

2. MOS Capacitor<br />

3. CCD<br />

Si<br />

C<br />

I<br />

V<br />

LOW F<br />

HI F<br />

VG<br />

OUT<br />

20/39 K. Ng


S<br />

UNIPOLAR VS. BIPOLAR <strong>DEVICES</strong><br />

3-TERMINAL MOSFET<br />

JFET<br />

S G D<br />

n + n n +<br />

p +<br />

ENHANCEMENT JFET<br />

–Jn<br />

n<br />

“UNIPOLAR” “BIPOLAR”<br />

Jp J p<br />

p<br />

BIPOLAR<br />

(Junction trans)<br />

2-TERMINAL SCHOTTKY p-n JUNCTION<br />

G<br />

D<br />

n + p n +<br />

MOSFET<br />

E B C<br />

n+ p n+<br />

BIPOLAR TRANS<br />

(hole current is junk current)<br />

(Enh. JFET has forward-bias current)<br />

J n/J p = 10 3–10 4 J n/J p ≈ N D/N A ≈ 10 20/10 16 ≈ 10 4<br />

–J n<br />

SCHOTTKY BARRIER p-n JUNCTION<br />

n +<br />

21/39 K. Ng


(TRANSFER-RESISTOR, EQUIVALENT TO TRIODE)<br />

FIELD-EFFECT TRANSISTOR POTENTIAL-EFFECT TRANSISTOR<br />

(FET) (PET)<br />

CONTROL (GATE) CONTROL (BASE)<br />

CAPACITOR<br />

SOURCE DRAIN<br />

TRANSISTOR<br />

EMITTER COLLECTOR<br />

CHANNEL CHANNEL<br />

22/39 K. Ng


1.Diodes Rectifiers<br />

Neg Resist N-shape<br />

S-shape<br />

Transit-Time<br />

2.Resistive/Capacitive Devices<br />

3.Transistors FET<br />

PET<br />

4.Nonvolatile Memories<br />

5.Thyristors and Power<br />

6.Photonics Light Sources<br />

Photodetectors<br />

Bistable Opt Dev<br />

Others<br />

7.Sensors<br />

23/39 K. Ng<br />

1. MOSFET<br />

IGFET<br />

2. Junction FET<br />

(JFET)<br />

3. MESFET<br />

4. MODFET<br />

HEMT,<br />

TEGFET, SDHT<br />

5. Permeable-Base<br />

Trans<br />

6. Static-Induction<br />

Trans (SIT)<br />

Analog Trans,<br />

multi-chan FET<br />

7. Real-Space-<br />

Transfer Trans,<br />

NERFET, CHINT<br />

8. Planar-Doped FET<br />

9. Surface-Tunnel<br />

Trans<br />

10. Lateral Resonant-<br />

Tunneling FET<br />

11. Stark-Effect Trans<br />

12. Velocity-<br />

Modulation Trans<br />

2<br />

4<br />

S<br />

n+<br />

p<br />

n +<br />

S G D n+<br />

n + p+<br />

n<br />

p+<br />

S G D<br />

n<br />

n + n +<br />

SEMI-IN GaAs<br />

G<br />

n-AlGaAs<br />

D<br />

n+ n+<br />

2-D GAS i-GaAs<br />

SEMI-IN GaAs<br />

5<br />

6<br />

1<br />

3<br />

n<br />

n<br />

p +-G<br />

n+<br />

n +<br />

n +<br />

n+<br />

S<br />

n<br />

D<br />

7<br />

9<br />

10<br />

11<br />

8<br />

S<br />

G<br />

i<br />

i<br />

D<br />

n+ n+<br />

GATES<br />

S D<br />

12<br />

S i-GaAs<br />

n+<br />

i-AlGaAs<br />

n+-GaAs<br />

n +<br />

E C<br />

n-Si<br />

D<br />

n+<br />

C<br />

p +<br />

G<br />

S G1 D<br />

n + n +<br />

Ch-1<br />

Ch-2<br />

SEMI-IN GaAs


1.Diodes Rectifiers<br />

Neg Resist N-shape<br />

S-shape<br />

Transit-Time<br />

2.Resistive/Capacitive Devices<br />

3.Transistors FET<br />

PET<br />

4.Nonvolatile Memories<br />

5.Thyristors and Power<br />

6.Photonics Light Sources<br />

Photodetectors<br />

Bistable Opt Dev<br />

Others<br />

7.Sensors<br />

24/39 K. Ng<br />

1. Bipolar Transistor<br />

Junction transistor<br />

2. Tunneling HE Transfer<br />

Amp (THETA),<br />

MOMOM<br />

3. Metal-Base Transistor<br />

4. Bipolar Inv-Ch FET<br />

(BICFET)<br />

5. Tunnel-Emitter Tran<br />

Inver-base bipolar tran<br />

6. Planar-Doped-Barrier<br />

Transistor<br />

7. Heterojunction Hot-<br />

Electron Tran<br />

8. Induced-Base<br />

Transistor<br />

9. Resonant-Tunneling<br />

Bipolar Transistor<br />

10. Resonant-Tunneling<br />

Hot-Electron Transistor<br />

11. Quantum-Well-Base<br />

Resonant-Tunnel. Tran<br />

12. Spin-Valve Transistor<br />

4<br />

n<br />

1<br />

n+<br />

E<br />

2<br />

5<br />

6<br />

3<br />

n+<br />

E<br />

n<br />

B<br />

p<br />

n+<br />

B<br />

B<br />

n +<br />

B<br />

C<br />

n+<br />

n<br />

n<br />

C<br />

n+<br />

7<br />

n<br />

E<br />

8<br />

n<br />

9<br />

n<br />

10<br />

12<br />

n<br />

11<br />

E<br />

n<br />

B<br />

p<br />

B<br />

n<br />

C<br />

C<br />

n<br />

n<br />

n<br />

n


1.Diodes Rectifiers<br />

Neg Resist N-shape<br />

S-shape<br />

Transit-Time<br />

2.Resistive/Capacitive Devices<br />

3.Transistors FET<br />

PET<br />

4.Nonvolatile Memories<br />

5.Thyristors and Power<br />

6.Photonics Light Sources<br />

Photodetectors<br />

Bistable Opt Dev<br />

Others<br />

7.Sensors<br />

1. FAMOS<br />

Transistor<br />

2. SONOS<br />

Transistor<br />

3. PCRAM<br />

4. FeRAM<br />

5. MRAM<br />

G<br />

n<br />

p-Si<br />

+ S D<br />

n+<br />

S<br />

p+<br />

G<br />

SiN<br />

n-Si<br />

D<br />

p +<br />

25/39 K. Ng


1.Diodes Rectifiers<br />

Neg Resist N-shape<br />

S-shape<br />

Transit-Time<br />

2.Resistive/Capacitive Devices<br />

3.Transistors FET<br />

PET<br />

4.Nonvolatile Memories<br />

5.Thyristors and Power<br />

6.Photonics Light Sources<br />

Photodetectors<br />

Bistable Opt Dev<br />

Others<br />

7.Sensors<br />

1. SCR,<br />

Thyristor<br />

2. Insulated-Gate Bipolar<br />

Transistor,<br />

Conductivity-<br />

Modulated FET<br />

(COMFET)<br />

3. Unijunction Transistor,<br />

Filamentary<br />

Transistor<br />

4. Static-Induction<br />

Thyristor<br />

C<br />

n<br />

p<br />

n<br />

p<br />

n<br />

p<br />

G<br />

VE<br />

A<br />

C<br />

G<br />

A<br />

n+<br />

p p+<br />

IE<br />

p +<br />

n+<br />

n –<br />

p +<br />

n–<br />

p<br />

B-2<br />

p +<br />

n<br />

B-1<br />

p+<br />

VBB<br />

I A<br />

IA<br />

I E VBB<br />

= 0<br />

V AK<br />

IA V G<br />

V AK<br />

VBB > 0<br />

VG<br />

V AK<br />

VE<br />

26/39 K. Ng


1.Diodes Rectifiers<br />

Neg Resist N-shape<br />

S-shape<br />

Transit-Time<br />

2.Resistive/Capacitive Devices<br />

3.Transistors FET<br />

PET<br />

4.Nonvolatile Memories<br />

5.Thyristors and Power<br />

6.Photonics Light Sources<br />

Photodetectors<br />

Bistable Opt Dev<br />

Others<br />

7.Sensors<br />

1. LED<br />

2. Injection Laser<br />

Junction laser<br />

p<br />

n<br />

n+<br />

n +<br />

p+<br />

N 2<br />

N1<br />

E C<br />

EV<br />

IN OUT<br />

27/39 K. Ng


1.Diodes Rectifiers<br />

Neg Resist N-shape<br />

S-shape<br />

Transit-Time<br />

2.Resistive/Capacitive Devices<br />

3.Transistors FET<br />

PET<br />

4.Nonvolatile Memories<br />

5.Thyristors and Power<br />

6.Photonics Light Sources<br />

Photodetectors<br />

Bistable Opt Dev<br />

Others<br />

7.Sensors<br />

28/39 K. Ng<br />

1. Photoconductor<br />

2. p-i-n Photodiode<br />

3. Schottky-Barrier<br />

Photodiode<br />

4. Charge-Coupled<br />

Image Sensor<br />

5. Avalanche Photodiode<br />

(APD)<br />

6. Phototransistor<br />

7. Metal-Semiconductor-<br />

Metal Photodetector<br />

8. Quantum-Well IR<br />

Photodetector (QWIP)<br />

9. Quantum-Dot IR<br />

Photodetector (QDIP)<br />

10. Block-Impurity-Band<br />

Photodetector<br />

11. Negative-Electron-<br />

Affinity (NEA)<br />

Photocathode<br />

12. Photon-Drag Detector<br />

3<br />

1<br />

p+<br />

2<br />

4<br />

5<br />

E<br />

6<br />

I<br />

i<br />

B<br />

LIGHT<br />

DARK<br />

V<br />

n +<br />

C<br />

10<br />

11<br />

12<br />

8<br />

7<br />

9<br />

n-InGaAs<br />

SEMI-IN InP<br />

+ + + + + +<br />

DONORS<br />

ACCEPTORS<br />

V<br />

Evac<br />

qχ<br />

SEMICOND


1.Diodes Rectifiers<br />

Neg Resist N-shape<br />

S-shape<br />

Transit-Time<br />

2.Resistive/Capacitive Devices<br />

3.Transistors FET<br />

PET<br />

4.Nonvolatile Memories<br />

5.Thyristors and Power<br />

6.Photonics Light Sources<br />

Photodetectors<br />

Bistable Opt Dev<br />

Others<br />

7.Sensors<br />

1. Self-Electrooptic-<br />

Effect Device (SEED)<br />

2. Bistable Etalon<br />

Fabry-Perot<br />

Resonator<br />

p +<br />

IN OUT<br />

MQW<br />

Iin<br />

n+<br />

nr = f(I)<br />

I = f(nrL)<br />

Iout<br />

LIGHT OUTPUT<br />

LIGHT OUT<br />

α ∝ 1/E<br />

29/39 K. Ng<br />

LIGHT INPUT<br />

LIGHT IN


1.Diodes Rectifiers<br />

Neg Resist N-shape<br />

S-shape<br />

Transit-Time<br />

2.Resistive/Capacitive Devices<br />

3.Transistors FET<br />

PET<br />

4.Nonvolatile Memories<br />

5.Thyristors and Power<br />

6.Photonics Light Sources<br />

Photodetectors<br />

Bistable Opt Dev<br />

Others<br />

7.Sensors<br />

1. Solar Cell<br />

2. Electroabsorption<br />

Modulator<br />

p-n JUNCTION<br />

SCHOTTKY BARRIER<br />

IN OUT<br />

MQW<br />

n+<br />

TRANS<br />

J<br />

30/39 K. Ng<br />

DARK<br />

LIGHT<br />

V<br />

V


1.Diodes Rectifiers<br />

Neg Resist N-shape<br />

S-shape<br />

Transit-Time<br />

2.Resistive/Capacitive Devices<br />

3.Transistors FET<br />

PET<br />

4.Nonvolatile Memories<br />

5.Thyristors and Power<br />

6.Photonics Light Sources<br />

Photodetectors<br />

Bistable Opt Dev<br />

Others<br />

7.Sensors<br />

1. Thermistor<br />

2. Hall Plate, Hall<br />

Generator<br />

3. Strain Gauge<br />

4. Interdigital<br />

Transducer, SAW<br />

Transducer<br />

5. Ion-Sensitive FET,<br />

CHEMFET<br />

Vin<br />

R<br />

B<br />

V<br />

T<br />

STRAIN GAUGE<br />

V G<br />

n+ n +<br />

p-Si<br />

Ix<br />

SAW<br />

Vout<br />

31/39 K. Ng


MARKET SHARE (%)<br />

100<br />

80<br />

60<br />

40<br />

20<br />

WORLD-WIDE IC MARKET (1980-2000)<br />

BIPOLAR<br />

MOSFET(Si)<br />

III-V<br />

0<br />

1980 1985 1990 1995 2000<br />

YEAR<br />

After S. M. Sze<br />

4%<br />

8%<br />

88%<br />

32/39 K. Ng


WHY Si (OVER OTHER <strong>SEMICONDUCTOR</strong>S)?<br />

NEAR-IDEAL <strong>SEMICONDUCTOR</strong>/OXIDE INTERFACE!<br />

BETTER CRYSTAL QUALITY THAN COMPOUND <strong>SEMICONDUCTOR</strong>S<br />

DISADVANTAGES<br />

INDIRECT ENERGY GAP => NO LIGHT SOURCE<br />

LESS FREEDOM IN HETEROEPITAXY<br />

SUBSTRATE NOT SEMI-INSULATING<br />

MOBILITY NOT AS HIGH<br />

33/39 K. Ng


10<br />

Sales ($Billion) 100<br />

DRAM<br />

Technology driver<br />

NVM (flash)<br />

SRAM<br />

1<br />

1990 1995 2000<br />

Year<br />

2005 2010<br />

Market size (arbitrary unit)<br />

Bipolar<br />

All semiconductor<br />

DRAM/CPU<br />

Nonvolatile memory<br />

1950 1970 1990 2010<br />

Year<br />

Floating-gate or SONOS type of MOSFETs will be dominant<br />

34/39 K. Ng


MAJOR DEVICE & CIRCUIT MILESTONES<br />

VACUUM TUBES (1904)<br />

BIPOLAR TRANSISTOR (1947)<br />

(1958) INTEG. CIRCUIT<br />

MOSFET (1960)<br />

(1963) CMOS<br />

(1968) DRAM<br />

(1971) MICROPRO<br />

JFET (1952)<br />

MESFET (1966)<br />

FAMOS (1967)<br />

MODFET (1980)<br />

(1826) RESISTOR<br />

(1938) SCHOTTKY BARRIER<br />

(1949) p-n JUNCTION<br />

(1951) LED<br />

(1956) SCR<br />

(1958) TUNNEL DIODE<br />

(1962) LASER<br />

(1963) GUNN DIODE<br />

(1965) IMPATT DIODE<br />

(1970) CCD<br />

(1974) RESONANT-TUNNELING DIODE<br />

35/39 K. Ng


METAL-<br />

<strong>SEMICONDUCTOR</strong><br />

n p n<br />

DEVICE BUILDING BLOCKS–5 INTERFACES<br />

METALLIZATION<br />

BIPOLAR<br />

n +<br />

IMPLANTATION/<br />

DIFFUSION<br />

E C<br />

EF<br />

E V<br />

DOPING HETEROJUNCTION<br />

POLY<br />

p-Si<br />

MOSFET<br />

n +<br />

EPITAXY<br />

OXIDATION<br />

<strong>SEMICONDUCTOR</strong>-<br />

INSULATOR<br />

METALLIZATION/CVD<br />

INSULATOR-<br />

METAL/POLY<br />

36/39 K. Ng


CURRENT-CONDUCTION MECHANISMS <strong>OF</strong><br />

<strong>SEMICONDUCTOR</strong> <strong>DEVICES</strong>.<br />

Mechanisms Examples<br />

Drift Resistor, most FETs<br />

Diffusion p-n junction, bipolar transistor<br />

Thermionic emission Schottky barrier, PDB diode<br />

Tunneling Tunnel diode, ohmic contact<br />

Recombination LED, p-i-n diode<br />

Generation Solar cell, photodetectors<br />

Avalanche IMPATT diode, Zener diode<br />

37/39 K. Ng


1. Fast intrinsic response?<br />

2. Fast circuit?<br />

V G<br />

“High-speed” device<br />

Parameters Considerations Speed fig-of-merit of FET<br />

Transit time Intrinsic, no capacitance gm/CG<br />

S-para. meas. (f T) No output capacitance, no runner g m/(C G+C ip)<br />

(fmax) Optimized load, no runner<br />

Ring oscillator Fan-out = 1, short runner gm/(CG+Cip+Cout)<br />

Real circuit Mult fan-outs, long runner, load capacitance g m/(C G+C ip+C out+C run+C lo)<br />

High intrinsic speed not sufficient (although necessary)!<br />

Critical parameters: gm, CG, Cdrain, etc.<br />

I<br />

Q<br />

C<br />

VL<br />

I I I<br />

Speed ≈ --- ≈ ---------- ≈ ----------- ≈<br />

Q CV<br />

L<br />

CV<br />

G<br />

g<br />

m<br />

------<br />

C<br />

38/39 K. Ng


CONCLUDING REMARKS<br />

• Identified ~ 77 major devices, ~ 120 variations.<br />

• All semiconductor devices are based on 5 building blocks.<br />

• Few devices dominate > 95% of market.<br />

• Si continues to dominate (~ 97%).<br />

• MOSET continues to be the workhorse of industry (~ 80%).<br />

• Most-common MOSFETs are in the form of floating-gate and charge-trapping<br />

(SONOS) nonvolatile memories (flash), not as logic devices.<br />

• Some confusion in device names, e.g. diode, switch, bipolar/unipolar, etc. Duplication<br />

of names: e.g. MODFET/HEMT/TEGFET/SDHT.<br />

• What has happened in the last 10 years:<br />

1. Many newer structures are old devices (e.g. carbon nanotube, nanowire, graphene<br />

FETs are MOSFETs with new channel materials).<br />

2. Many new devices are not necessary semiconductor devices (e.g. single-electron transsitor,<br />

spin devices, MIM switch...).<br />

3. Some are still in proposal stage (e.g. spin-based devices using spin rather than V or I<br />

as signal).<br />

39/39 K. Ng

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