Design specific variation in pattern transfer by via/contact etch ...
Design specific variation in pattern transfer by via/contact etch ...
Design specific variation in pattern transfer by via/contact etch ...
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Mentor Graphics Corp.,<br />
San Jose, CA, USA<br />
�J-H Choy<br />
�H. Hovsepyan<br />
�N. Khachatryan<br />
�A. Kteyan<br />
�H. �H. Lazaryan<br />
�L. Manukyan<br />
�Yu. Granik<br />
�A. Markosian<br />
�V. Sukharev<br />
Thank you!<br />
TEAM:<br />
Toshiba Corp., Japan<br />
�Seiji Onoue,<br />
�Takuo Kikuchi,<br />
�Tetsuya Kamigaki<br />
Institute of Microelectronics,<br />
S<strong>in</strong>gapore<br />
�Vladimir Bliznetsov