Design specific variation in pattern transfer by via/contact etch ...
Design specific variation in pattern transfer by via/contact etch ...
Design specific variation in pattern transfer by via/contact etch ...
Create successful ePaper yourself
Turn your PDF publications into a flip-book with our unique Google optimized e-Paper software.
Calibration/Prediction - Ma<strong>in</strong> Etch<br />
� BARC CD widen<strong>in</strong>g due to PR loss dur<strong>in</strong>g ma<strong>in</strong> <strong>etch</strong><strong>in</strong>g is considered:<br />
CDBARC<br />
− CDBARC.<br />
o = α0<br />
'+ α1γ<br />
F[<br />
1−α<br />
2(<br />
1−<br />
α3D)]<br />
≥ 0<br />
CD<br />
CDBott<br />
− CD<br />
CD<br />
CD<br />
Bott<br />
BARC.<br />
o<br />
BARC<br />
BARC<br />
= CD<br />
= CD<br />
BARC<br />
γ<br />
+ β1(<br />
γ<br />
⎧β0<br />
= β0'+<br />
1<br />
⎨<br />
⎩α<br />
0 = α0<br />
'+<br />
1<br />
γ CF γ CF 2 γ CF 3<br />
= β0<br />
'+<br />
β 1 + β2<br />
( ) + β3(<br />
) ≤ 0<br />
γ γ γ<br />
BARC . o<br />
CF<br />
F<br />
F<br />
γ<br />
⋅[<br />
β0<br />
+ β1(<br />
γ<br />
F<br />
γ<br />
) + β2<br />
(<br />
γ<br />
⋅ { αα<br />
+ αα<br />
γγ<br />
[ 1 − −αα<br />
( 1 − −αα<br />
D )]}[ ββ<br />
+<br />
0<br />
γ<br />
) + β2<br />
(<br />
γ<br />
1<br />
CF<br />
F<br />
)<br />
CF<br />
F<br />
F<br />
2<br />
2<br />
γ<br />
+ β3(<br />
γ<br />
CF<br />
F<br />
)<br />
3<br />
2<br />
F<br />
γ<br />
+ β3(<br />
γ<br />
α 0, α 1, α 2, α 3, β 0, β 1, β 2 , β 3 : calibration parameters.<br />
CD bott : simulated Bottom CD after ma<strong>in</strong> <strong>etch</strong><strong>in</strong>g.<br />
CF<br />
F<br />
)<br />
3<br />
]<br />
0<br />
CF<br />
� Result : R 2 = 0.70<br />
F<br />
)<br />
3<br />
]<br />
Simulationed, nm<br />
CD, nm<br />
285<br />
275<br />
265<br />
255<br />
245<br />
235<br />
225<br />
215<br />
205<br />
195<br />
300<br />
280<br />
260<br />
240<br />
220<br />
200<br />
180<br />
Measured<br />
Simulated<br />
1 3 5 7 9 11 13 15 17 19 21 23 25 27 29 31 33 35 37 39<br />
y = 0.81x + 44.52<br />
R2 = 0.701<br />
Via No.<br />
195 205 215 225 235 245 255 265 275 285<br />
Measured, nm<br />
Copyright ©2008, Mentor Graphics.
Change language