Design specific variation in pattern transfer by via/contact etch ...
Design specific variation in pattern transfer by via/contact etch ...
Design specific variation in pattern transfer by via/contact etch ...
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F Concentration, mass fraction<br />
Reduced Fluor<strong>in</strong>e concentration<br />
Case 1<br />
edge<br />
Copyright ©2008, Mentor Graphics. Case 2<br />
37