Design specific variation in pattern transfer by via/contact etch ...
Design specific variation in pattern transfer by via/contact etch ...
Design specific variation in pattern transfer by via/contact etch ...
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VCE/LE Capabilities<br />
Post-<strong>etch</strong> contours<br />
• Three steps of litho simulation for poly layer<br />
Post-exposure<br />
Post-photoresist<br />
Post-<strong>etch</strong><br />
Copyright ©2008, Mentor Graphics.<br />
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