Design specific variation in pattern transfer by via/contact etch ...
Design specific variation in pattern transfer by via/contact etch ...
Design specific variation in pattern transfer by via/contact etch ...
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No dummy fill<br />
VCE Capability<br />
Effect of dummy fill on across-die CD <strong>variation</strong><br />
With dummy fill<br />
Copyright ©2008, Mentor Graphics.<br />
28<br />
CD map full range = 6e -3