Design specific variation in pattern transfer by via/contact etch ...

Calculation of Gas Kinetic Parameters
- Calculation of binary diffusivities
σ + σ
2
D
ij
T
⎛
⎜
1
⎜
⎝ M
i
= 0.
0018583
2
Pσ
ij
i j A C E G
Here σ ij = Ωij
= + + + and
* B
*
*
*
exp DT exp FT exp HT
3
1
+
M
* T
, T =
( T ) ( ) ( ) ( )
,
ε
Ω
ij
ij
j
⎞
⎟
⎠
ε ij
=
k
B
ε ε i j
k k
A = 1.06036, B = 0.15610, C = 0.193, D = 0.47635, E = 1.03587, F = 1.52996, G = 1.76474, H
= 3.89411. Total gas pressure P in [atm], temperature T in [K] and cross-section σ σij in [A].
Parameters T* and Ω ij are dimensionless. The resulting binary diffusivities D ij are in [cm 2 s -1 ].
( 1−
x )
- Effective diffusivity of i-th radical in the gas mixture: i D xk is the mole fraction of
i =
the k-th component
xk
= 100
8RT
⎛
⎜
1
π ⎝ M
1
+
M
∑
k ≠i
Dik
ij
- Calculation of binary velocities ⎜ ⎟ . Velocities are in [cm/s].
( )
1−
xi
Effective velocities: ci
=
x and mean free path for i-th radical
k
c
∑
k ≠i
ik
c
i
j
⎞
⎟
⎠
D
λi
= 3
c
Copyright ©2008, Mentor Graphics.
i
i
B
B
23