Design specific variation in pattern transfer by via/contact etch ...
Design specific variation in pattern transfer by via/contact etch ...
Design specific variation in pattern transfer by via/contact etch ...
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Etch Stop Condition<br />
� Etch stops when ions lose all their energy while penetrat<strong>in</strong>g the C-F layer. A<br />
condition for the <strong>etch</strong> stop is follows:<br />
k′<br />
D<br />
LE ( Γ )<br />
k<br />
i<br />
R<br />
Γ<br />
O<br />
Γ<br />
CF<br />
2<br />
=<br />
ρS<br />
M<br />
C<br />
� Knowledge of distributions of ion-neutrals fluxes along the <strong>etch</strong>ed surface:<br />
allows to determ<strong>in</strong>e a regions where <strong>etch</strong> is completely stopped<br />
1<br />
3<br />
E0<br />
µ<br />
Γ<br />
( , y),<br />
Γ ( x,<br />
y),<br />
Γ ( x,<br />
y)<br />
2<br />
i<br />
x CF<br />
O<br />
Copyright ©2008, Mentor Graphics.<br />
19
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