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Voltage References

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Figure 4. Portion of a Process Flow Chart From Wafer Fab, Showing Documentation Control and SPC<br />

FLOW OPERATION<br />

Characteristics: Code<br />

A<br />

B<br />

C<br />

D<br />

Process Rei.<br />

Location No.<br />

B.LOXIDE<br />

EPI<br />

QA<br />

QA<br />

BURIED LAYER OXIDE<br />

Process Control Plan<br />

DOCUMENTATION &<br />

REFERENCE #<br />

PREDIFFUSION CLEAN 12MSM 45640A<br />

WAFER INSPECTION AFTER CLEAN 12MSM 53692A<br />

BURIED LAYER OXIDE<br />

NANOSPEC/AFTER DEP.<br />

CVPLOITING<br />

CV EVALUATION<br />

BURIED LAYER OXIDE<br />

WAFERTRAC PROCESS<br />

(SCRUB/BAKEICOATIBAKE)<br />

12MSM 35443A REF. #1<br />

12MSM 51418A<br />

12MSM 53805A<br />

12MSM 45486A<br />

12MSM 51416A REF. #10<br />

12MSM 35093A<br />

416A<br />

SPC<br />

IMPLEMENTATION<br />

CONTROL PLAN, OXIDE THICKNESS<br />

X BAR & R. RESIST THICKNESS<br />

p..CHART, A.D.1. REDO<br />

Figure 5. Part of a Wafer Fab Control Plan, Showing Statistical Process Control Details<br />

Description Code Description<br />

VISUAL DEFECTS E FILM SHEET RESISTANCE<br />

VISUAL DEFECTS ... MICROSCOPE F REFRACTIVE INDEX<br />

PARTICLE ... MONITOR G CRITICAL DIMENSION<br />

FILM THICKNESS H CVPLOT<br />

Reaction Plan:<br />

Characteristic Pari/Process Measurements Analysis Frequency Point out 01<br />

Affected Detail Method Methods Sample Size Umit(3) (4)<br />

D OXIDE NANOMETRIC CONTROL EVERY RUN IMPOUND LOT (1)<br />

THICKNESS GRAPH 3WFR/RUN ADJUST TIME TO<br />

CENTER PROCESS<br />

PER SPEC<br />

D THICKNESS DIGILAB X RCHART EVERY RUN IMPOUND LOT (1)<br />

5SITESIWFR NOTIFY ENGR.<br />

D THICKNESS DIGILAB XRCHART lWFR/SHIFT IMPOUND LOT (2)<br />

5SITESIWFR NOTIFY ENGR.<br />

E FILM 4PTPROBE XRCHART EVERY RUN IMPOUND LOT (1)<br />

RESISTIVITY 5SITESIWFR NOTIFY ENGR.<br />

E FILM 4PTPROBE X RCHART lWFR/SHIFT IMPOUND LOT (2)<br />

RESISTIVITY 5SITESIWFR NOTIFY ENGR.<br />

MOTOROLA LINEAR/INTERFACE ICs DEVICE DATA<br />

14-4<br />

MOVINGR EVERY LOT IMPOUND LOT<br />

1 CTRLWFR NOTIFY ENGR.<br />

PER LOT

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