download/files/LCQ Deca_Duo Hardware Troubleshooting_8601.pdf
download/files/LCQ Deca_Duo Hardware Troubleshooting_8601.pdf
download/files/LCQ Deca_Duo Hardware Troubleshooting_8601.pdf
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<strong>LCQ</strong> <strong>Deca</strong> Optics<br />
Typical Operating Pressures/Comparison to <strong>LCQ</strong> Classic<br />
1.3 torr 1.7x10-3 760 torr torr 2.0 x10-5 torr (1.0x10-5 torr He)<br />
60 m 3 /hr<br />
100 L/sec<br />
3.5x10 -3 torr He<br />
220 L/sec