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download/files/LCQ Deca_Duo Hardware Troubleshooting_8601.pdf

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760 torr<br />

<strong>LCQ</strong> Classic Optics<br />

Typical Operating Pressures<br />

1.0 torr 1.7x10 -3 torr<br />

30 m 3 /hr<br />

100 L/sec<br />

2.0 x10 -5 torr (1.0x10 -5 torr He)<br />

3.5x10 -3 torr He<br />

220 L/sec

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