download/files/LCQ Deca_Duo Hardware Troubleshooting_8601.pdf
download/files/LCQ Deca_Duo Hardware Troubleshooting_8601.pdf
download/files/LCQ Deca_Duo Hardware Troubleshooting_8601.pdf
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760 torr<br />
<strong>LCQ</strong> Classic Optics<br />
Typical Operating Pressures<br />
1.0 torr 1.7x10 -3 torr<br />
30 m 3 /hr<br />
100 L/sec<br />
2.0 x10 -5 torr (1.0x10 -5 torr He)<br />
3.5x10 -3 torr He<br />
220 L/sec