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S.1 Spacecraft Propulsion Systems Chapter 1: Introduction to ...

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wafer 4<br />

wafer 3<br />

wafer 2<br />

wafer 1<br />

Several filter<br />

structures<br />

(different types)<br />

- 13 -<br />

Gas Module Design<br />

(Courtesy by 'Ångström Space Technology Centre')<br />

wafer 7<br />

A<br />

Pressure<br />

sensor<br />

Gas sensing<br />

volume<br />

Piezo actua<strong>to</strong>r<br />

B<br />

3000 µm<br />

Valve cap<br />

Valve seat<br />

A<br />

Pressure sensor<br />

reference cavity<br />

Heat exchanger<br />

Thin film heater<br />

Nozzle<br />

Ambient pressure<br />

channel

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