W. Richard Bowen and Nidal Hilal 4
W. Richard Bowen and Nidal Hilal 4
W. Richard Bowen and Nidal Hilal 4
- No tags were found...
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
REFERENCEs 25<br />
[14] J. Thaysen, A. Boisen, O. Hansen, S. Bouwstra, Atomic force microscopy probe with<br />
piezoresiostive read-out <strong>and</strong> a highly symmetrical Wheatstone bridge arrangement,<br />
Sensors Actuat. A 83 (2000) 47–53.<br />
[15] S. Akamine, R.C. Barrett, C.F. Quate, Improved atomic force microscope images using<br />
microcantilevers with sharp tips, Appl. Phys. Lett. 57 (3) (1990) 316–318.<br />
[16] T.R. Albrecht, S. Akamine, T.E. Carver, C.F. Quate, Microfabrication of cantilever styli<br />
for the atomic force microscope, J. Vac. Sci. Technol. A 8 (4) (1990) 3386–3396.<br />
[17] J. Brugger, R.A. Buser, N.F. de Rooij, Silicon cantilevers <strong>and</strong> tips for scanning force<br />
microscopy, Sensors Actuat. A 34 (1992) 193–200.<br />
[18] C. Liu, R. Gamble, Mass-producible monolithic silicon probes for scanning probe<br />
microscopes, Sensors Actuat. A 71 (1998) 233–237.<br />
[19] O. Wolter, T. Bayer, J. Greschner, Micromachined silicon sensors for scanning force<br />
microscopy, J. Vac. Sci. Technol. B 9 (2) (1990) 1353–1357.<br />
[20] S. Hosaka, K. Etoh, A. Kikukawa, H. Koyanagi, K. Itoh, 6.6 MHz silicon AFM cantilever<br />
for high-speed readout in AFM based recording, Microelectron. Eng. 46 (1999)<br />
109–112.<br />
[21] S. Habermehl, Stress relaxation in Si-rich silicon nitride thin films, J. Appl. Phys. 83 (9)<br />
(1998) 4672–4677.<br />
[22] K.E. Peterson, Silicon as a mechanical material, Proc. IEEE 70 (5) (1982) 420–457.<br />
[23] A. Khan, J. Philip, P. Hess, Young’s modulus of silicon nitride used in scanning force<br />
microscope cantilevers, J. Appl. Phys. 95 (4) (2004) 1667–1672.<br />
[24] J.J. Wortman, R.A. Evans, Young’s modulus, shear modulus, <strong>and</strong> Poisson’s ratio in<br />
silicon <strong>and</strong> germanium, J. Appl. Phys. 36 (1) (1965) 153–156.<br />
[25] T. Hantschel, S. Slesazeck, P. Niedermann, P. Eyben, W. V<strong>and</strong>ervorst, Integrating<br />
diamond pyramids into metal cantilevers <strong>and</strong> using them as electrical AFM probes,<br />
Microelectron. Eng. 57–58 (2001) 749–754.<br />
[26] K. Unno, T. Shibata, E. Makino, Micromachining of diamond probes for atomic force<br />
microscopy applications, Sensors Actuat. A 88 (2001) 247–255.<br />
[27] W. Kulisch, A. Malave, G. Lippold, W. Scholtz, C. Mihalcea, E. Oesterschulze,<br />
Fabrication of integrated diamond cantilevers with tips for SPM applications,<br />
Diamond Relat. Mater. 6 (1997) 906–911.<br />
[28] T. Akiyama, U. Staufer, N.F. De Rooij, L. Howald, L. Sc<strong>and</strong>ella, Lithographically<br />
defined polymer tips for quartz tuning fork based scanning probe microscopes,<br />
Microelectron. Eng. 58-58 (2001) 769–773.<br />
[29] R. Erl<strong>and</strong>sson, G. Hadziioannou, C.M. Mate, G.M. McClellamd, S. Chiang, Atomic<br />
scale friction between the muscovite mica cleavage plane <strong>and</strong> a tungsten tip, J. Chem.<br />
Phys. 89 (8) (1988) 5190–5192.<br />
[30] C.M. Mate, G.M. McClellamd, R. Erl<strong>and</strong>sson, S. Chiang, Atomic-scale friction of a<br />
tungsten tip on a graphite surface, Phys. Rev. Lett. 59 (17) (1987) 1942–1946.<br />
[31] Y. Miyahara, T. Fujii, S. Watanabe, A. Tonoli, S. Carabelli, H. Yamada, H. Bleuler, Lead<br />
zirconate titanate cantilever for non-contact atomic force microscopy, Appl. Surf. Sci.<br />
140 (1999) 428–431.<br />
[32] A.H. Sorenson, U. Hvid, M.W. Mortensen, K.A. Morch, Preparation of platinum/<br />
iridium scanning probe microscopy tips, Rev. Sci. Instrum. 70 (7) (1999) 3059–3067.<br />
[33] E.I. Givargizov, A.N. Stepanova, E.S. Mashkova, V.A. Molchanov, F. Shi, P. Hudek,<br />
I.W. Rangelow, Ultrasharp diamond coated silicon tips for scanning probe devices,<br />
Microelectron. Eng. 41/42 (1998) 499–502.<br />
[34] E.I. Givargizov, A.N. Stepanova, L.N. Obelenskaya, E.S. Mashkova, V.A. Molchanov,<br />
M.E. Givargizov, I.W. Rangelow, Whisker probes, Ultramicroscopy 82 (2000) 57–61.<br />
[35] S.S. Wong, E. Joselevich, A.T. Woolley, C.L. Cheung, C.M. Lieber, Covalently functionalized<br />
nanotubes as nanometre sized probes in chemistry <strong>and</strong> biology, Nature 394<br />
(1998) 52–55.