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W. Richard Bowen and Nidal Hilal 4

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6 1. BAsIC PRINCIPLEs OF ATOMIC FORCE MICROsCOPy<br />

.6 CalIbraTIon of afm mICroCanTIlevers<br />

.6. Calibration of normal spring Constants<br />

For the accurate measurement of forces, the spring constant of the cantilever<br />

needs to be known. In particular, for forces normal to the surfaces<br />

of interest, this is the spring constant which governs the relationship<br />

between force <strong>and</strong> deflection in the z-direction, as opposed to the lateral<br />

<strong>and</strong> torsional spring constants (see Section 1.4.2). Although cantilevers<br />

are supplied with a manufacturers’ ‘nominal’ value, the actual value can<br />

vary to a high degree, mostly due to variations in the thickness of the<br />

levers <strong>and</strong> defects in the material of the cantilevers themselves. The cubic<br />

relationship between thickness <strong>and</strong> the spring constant seen in equation<br />

(1.2) means that small variations in thickness can cause significant variations<br />

in k. Because of this variability, for force experiments the cantilevers<br />

to be used need to be calibrated to determine a more accurate value of k.<br />

There are now a large number of methods by which the spring constant<br />

can be calculated, each with their own advantages <strong>and</strong> disadvantages.<br />

Four of the most extensively used approaches are described later.<br />

A number of methods exist which involve calculating spring constants<br />

based upon the dimensions <strong>and</strong> geometry of the lever. Whilst calculations<br />

for rectangular cantilevers, such as in equation (1.2), are relatively<br />

straightforward, for V-shaped cantilevers, approximations are most often<br />

used based upon a simplification of their geometry, e.g. Sader approximated<br />

a V-shaped cantilever to two parallel rectangular beams [96]. This<br />

resulted in the following equation to describe a V-shaped lever:<br />

3<br />

Et w ⎧ 3<br />

4w<br />

⎫<br />

k � cos � 1 � 3 � 2<br />

3 ⎨<br />

⎪ ( cos � )<br />

3<br />

⎬<br />

⎪<br />

2l<br />

⎩<br />

⎪ b<br />

⎭<br />

⎪<br />

�1<br />

(1.3)<br />

where � is the inside angle between the two arms of the V-shaped lever,<br />

w the width of each of the lever arms parallel to the base of the lever <strong>and</strong><br />

b the outer width of the base of the lever (see Figure 1.5 for diagrammatic<br />

explanation of the dimensions). This equation, as well as equation<br />

(1.2), assumes that the point of loading of force on the cantilever will be<br />

at the very apex. As the probe tip itself, where the loading of force actually<br />

occurs, is often sited a short distance from the very end, this needs to<br />

be taken into account. A simple correction may be applied based on the<br />

length of the lever <strong>and</strong> the distance of the probe from the end of the lever<br />

[96–98]:<br />

k � k ( l/ ∆l) 3 (1.4)<br />

c m<br />

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