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W. Richard Bowen and Nidal Hilal 4

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9.2 dyNAMIC AFM METHOdS 251<br />

be compressed by a distance �z 3 such that �z 1 � �z 2 � �z 3. Therefore<br />

the deflection of the cantilever �z 2 is less on softer materials, <strong>and</strong> the term<br />

�z 2/�z 1 is deemed to be indicative of surface compliance (Figure 9.2).<br />

This method can be implemented using the advanced capabilities<br />

of modern AFMs, one approach is similar to that described by Scott <strong>and</strong><br />

Bushan (2003) [2]. In this example, the modulating amplitude is obtained<br />

by inducing vibration of the cantilever, the sample remaining fixed in position.<br />

Using an interleaved scanning approach, the sample height is first<br />

determined using tapping mode. The probe height is then adjusted such<br />

that (i) the probe is kept in constant contact with the surface <strong>and</strong> (ii) a constant<br />

scan height is maintained by compensating for the known sample<br />

height variation, i.e. the distance between the fixed end of the cantilever<br />

<strong>and</strong> the surface is held constant. The surface is then rescanned with the<br />

oscillating probe driven, in this case, at the resonant frequency (Figure 9.3).<br />

Clearly, the method by which the sample–tip interaction is spatially<br />

modulated can be achieved in several ways. The probe may be caused<br />

1<br />

1 2<br />

FIguRE 9.2 FMM: discrimination between areas of varying stiffness. (1) Hard substrate<br />

<strong>and</strong> (2) soft substrate; cantilever deflection signal �z 2 is reduced due to deformation of the<br />

sample.<br />

2

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