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W. Richard Bowen and Nidal Hilal 4

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6 1. BAsIC PRINCIPLEs OF ATOMIC FORCE MICROsCOPy<br />

.3 CanTIlevers <strong>and</strong> probes<br />

Depending upon the uses required <strong>and</strong> the forces which may act upon<br />

them, cantilevers may be chosen from a large range available. Most microcantilevers<br />

used in AFMs are produced from monolithic Si 3N 4 or Si using<br />

micromachining techniques developed in the semi-conductor industry [9,<br />

15–20]. These two materials are used extensively due to the high suitability<br />

of their mechanical properties such as high yield strengths <strong>and</strong> elastic moduli<br />

[21–24]. Applications where high forces are experienced require stiff<br />

levers with probes resistant to deformation. On the contrary, where low<br />

forces are experienced or when samples are soft <strong>and</strong> easily deformed, levers<br />

with low force constants are required for both the increased force sensitivity<br />

at low forces <strong>and</strong> avoiding deforming or damaging samples. In addition to<br />

these silicon-based cantilevers <strong>and</strong> probes, the literature describes a number<br />

of other materials which have been utilised in the production of AFM<br />

levers. These include the production of diamond tips integrated into silicon<br />

levers [25, 26] or fabricated diamond levers [27], particularly useful where<br />

the probe tip may be subject to very high pressures at the apex, such as during<br />

nano-indentation measurements; quartz ‘tuning fork’ levers with polymeric<br />

tips for dynamic imaging modes [28]; metal wires, such as tungsten,<br />

as levers [4, 29, 30]; as well as more exotic materials [31, 32]. In addition,<br />

ultrasharp probes with very high aspect ratios can be manufactured by the<br />

growing of Si ‘whiskers’ on the apex of the probe to improve the resolution<br />

of samples with rough surfaces due to their relatively high aspect ratio [33,<br />

34]. In addition, a large amount of work is being undertaken to investigate<br />

the attachment of carbon nanotubes to the apex of cantilever tips to act as<br />

ultrasharp probes. Carbon nanotubes have diameters typically in the range<br />

of 1–20 nm <strong>and</strong> a very high aspect ratio making them ideal, providing that<br />

they can be attached in a robust <strong>and</strong> predictable manner [35–39].<br />

Another topic which must be considered when undertaking AFM<br />

measurements is the presence of contaminants on the probe, particularly<br />

at the tip. Commercially bought probes are placed on a sticky polymer<br />

surface, such as polydimethylsiloxane (PDMS), in plastic boxes <strong>and</strong> as a<br />

result tend to be coated in a hydrophobic contaminant layer [40]. In addition<br />

to this, once removed from packaging, the probes are likely to suffer<br />

exposure to airborne organic contaminants with the likelihood of exposure<br />

increasing over time. This can have a significant effect on imaging<br />

resolution, which depends to a great extent on the radius of curvature<br />

of the probe tip being as small as possible. Even the presence of a small<br />

amount of contamination could increase this significantly. It has also been<br />

observed that the presence of a contamination layer can increase the measured<br />

adhesion values between a probe <strong>and</strong> surface under ambient conditions<br />

[41]. The resultant increased forces between probe <strong>and</strong> sample will

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