Modellierung gekoppelter Effekte in Mikrosystemen auf ...

182 LITERATURVERZEICHNIS
[153] R. WECHSUNG, N. ÜNAL, J. ELOY UND H. WICHT, Market analysis for microsystems
1996 – 2002 (A NEXUS Task Force Report), tech. report, NEXUS (Network
of Excellence in Multifunctional Microsystems), 1998.
[154] J. WIBBELER, D. SCHEIBNER UND J. MEHNER, Improved Coupled-Field
FE Analysis of Micromachined Electromechanical Transducers, in Proc. 11 ���
Int. Conf. on Solid-State Sensors and Actuators (Transducers’01), Munich, Germany,
June 10–14, 2001, S. 240–243.
[155] P. WOIAS, S. KOCH, E. MÜLLER, D. BARROW, J. CEFAI, G. CURTIS UND
H. HUGHES, An ISFET-FIA system for high precision pH recording, Sensors and
Actuators B, 15–16 (1993), S. 15–16.
[156] Y.-J. YANG, M.-A. GRETILLAT UND S. D. SENTURIA, Effect of air damping
on the dynamics of nonuniform deformation of microstructures, in Proc. of 9 ���
Int. Conf. on Solid-State Sensors and Actuators (Transducers’97), Chicago, June
16–19, 1997, S. 1093–1096.
[157] Y.-J. YANG UND S. D. SENTURIA, Numerical simulation of compressible
squeeze-film damping, in Tech. Digest Solid-State Sensor and Actuator Workshop,
Hilton Head, S. C., June 2–6, 1996, S. 76–79.
[158] H. YIE, X. CAI UND J. WHITE, Convergence Properties of Relaxation versus
Surface-Newton Generalized-Conjugate Residual Algorithm for Self-consistent
Electromechanical Analysis of 3-D Micro-Electro-Mechanical Structures, in
Proc. Numerical Process and Device Modeling (NUPAD) V, Honolulu, HI, 1994,
S. 137–140.
[159] G. ZELDER, Numerische Analyse und experimentelle Charakterisierung eines
BiCMOS-integrierten mikromechanischen Drucksensors, Diplomarbeit, Technische
Universität München, München, 1998.
[160] R. ZENGERLE, Mikro-Membranpumpen als Komponenten für Mikro-
Fluidsysteme, Dissertation, Univ. der Bundeswehr, Verlag Shaker, Aachen,
1994.
[161] R. ZENGERLE, S. KLUGE, M. RICHTER UND A. RICHTER, A bidirectional silicon
micropump, in Proceedings of IEEE Micro Electro Mechanical Systems, Amsterdam,
1995, S. 19–24.
[162] R. ZENGERLE, J. ULRICH, S. KLUGE, M. RICHTER UND A. RICHTER, A bidirectional
silicon micropump, Sensors and Actuators A, 50 (1995), S. 81–86.
[163] L. ZHAN, D. CHO, H. SHIRAISHI UND W. TRIMMER, Squeeze Film Damping in
Microelectromechanical Systems, ASME Micromechanical Systems, DSC-Vol. 40
(1992), S. 149–161.
[164] X. ZHANG UND W. C. TANG, Viscous Air Damping in Laterally Driven Microresonators,
Sensors and Materials, Vol. 7, No. 6 (1995), S. 415–430.